JPS6023282B2 - 相対変位測定装置 - Google Patents

相対変位測定装置

Info

Publication number: JPS6023282B2
Authority: JP; Japan
Prior art keywords: grating; light; frequency; image; movement
Prior art date: 1974-03-15
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP50031737A

Other languages

English (en)

Japanese (ja)

Other versions

JPS50136057A (nl

Inventor

アルフレツドセイスレナド

ロバ−ト・マ−テイン・ペテイグリユ−

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

National Research Development Corp UK

Original Assignee

National Research Development Corp UK

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1974-03-15

Filing date

1975-03-14

Publication date

1985-06-06

1974-03-15 Priority claimed from GB11598/74A external-priority patent/GB1504691A/en

1975-03-14 Application filed by National Research Development Corp UK filed Critical National Research Development Corp UK

1975-10-28 Publication of JPS50136057A publication Critical patent/JPS50136057A/ja

1985-06-06 Publication of JPS6023282B2 publication Critical patent/JPS6023282B2/ja

Status Expired legal-status Critical Current

Links

238000006073 displacement reaction Methods 0.000 title claims description 31
230000033001 locomotion Effects 0.000 claims description 38
230000000737 periodic effect Effects 0.000 claims description 37
230000003287 optical effect Effects 0.000 claims description 31
238000005286 illumination Methods 0.000 claims description 5
230000005540 biological transmission Effects 0.000 description 7
230000008859 change Effects 0.000 description 6
238000000034 method Methods 0.000 description 6
238000001514 detection method Methods 0.000 description 5
238000010586 diagram Methods 0.000 description 3
238000003384 imaging method Methods 0.000 description 3
230000000694 effects Effects 0.000 description 2
239000000463 material Substances 0.000 description 2
238000005259 measurement Methods 0.000 description 2
239000007787 solid Substances 0.000 description 2
JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
229910001218 Gallium arsenide Inorganic materials 0.000 description 1
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
230000009471 action Effects 0.000 description 1
239000000853 adhesive Substances 0.000 description 1
230000001070 adhesive effect Effects 0.000 description 1
230000002457 bidirectional effect Effects 0.000 description 1
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230000003993 interaction Effects 0.000 description 1
238000004519 manufacturing process Methods 0.000 description 1
238000012986 modification Methods 0.000 description 1
230000004048 modification Effects 0.000 description 1
238000012634 optical imaging Methods 0.000 description 1
230000004044 response Effects 0.000 description 1
238000009416 shuttering Methods 0.000 description 1
229910052710 silicon Inorganic materials 0.000 description 1
239000010703 silicon Substances 0.000 description 1
229920003002 synthetic resin Polymers 0.000 description 1
239000000057 synthetic resin Substances 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/363—Direction discrimination

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Length Measuring Devices By Optical Means (AREA)
Optical Transform (AREA)

JP50031737A 1974-03-15 1975-03-14 相対変位測定装置 Expired JPS6023282B2 (ja)

Applications Claiming Priority (4)

Application Number	Priority Date	Filing Date	Title
GB11598/74A GB1504691A (en)	1974-03-15	1974-03-15	Measurement apparatus
GB11598/74		1974-03-15
GB44522/74		1974-10-14
GB4452274		1974-10-14

Publications (2)

Publication Number	Publication Date
JPS50136057A JPS50136057A (nl)	1975-10-28
JPS6023282B2 true JPS6023282B2 (ja)	1985-06-06

Family

ID=26248389

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP50031737A Expired JPS6023282B2 (ja)	1974-03-15	1975-03-14	相対変位測定装置

Country Status (4)

Country	Link
JP (1)	JPS6023282B2 (nl)
DE (2)	DE7508197U (nl)
FR (1)	FR2329972A1 (nl)
NL (1)	NL185178C (nl)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0218680U (nl) *	1988-07-19	1990-02-07
US7186969B2 (en)	2003-02-12	2007-03-06	Mitutoyo Corporation	Optical configuration for imaging-type optical encoders
DE19701941B4 (de) *	1996-01-23	2016-01-14	Mitutoyo Corp.	Optischer Codierer

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS59170214U (ja) *	1983-04-30	1984-11-14	株式会社ベルデックス	マイクロスケ−ル
DE3325803C2 (de) *	1983-07-16	1986-11-20	Dr. Johannes Heidenhain Gmbh, 8225 Traunreut	Inkrementale, lichtelektrische Meßeinrichtung
DE3334398C1 (de) *	1983-09-23	1984-11-22	Dr. Johannes Heidenhain Gmbh, 8225 Traunreut	Messeinrichtung
GB8615197D0 (en) *	1986-06-21	1986-07-23	Renishaw Plc	Opto-electronic scale reading apparatus
GB8729066D0 (en) *	1987-12-12	1988-01-27	Renishaw Plc	Opto-electronic scale-reading apparatus
US4943716A (en) *	1988-01-22	1990-07-24	Mitutoyo Corporation	Diffraction-type optical encoder with improved detection signal insensitivity to optical grating gap variations
GB2216257B (en) *	1988-02-26	1992-06-24	Okuma Machinery Works Ltd	Optical linear encoder
JP3196459B2 (ja) *	1993-10-29	2001-08-06	キヤノン株式会社	ロータリーエンコーダ
JP3513251B2 (ja) *	1994-03-14	2004-03-31	キヤノン株式会社	光学式変位センサ
DE19859669A1 (de) *	1998-12-23	2000-06-29	Heidenhain Gmbh Dr Johannes	Integrierter optoelektronischer Sensor und Verfahren zu dessen Herstellung
DE19859670A1 (de)	1998-12-23	2000-06-29	Heidenhain Gmbh Dr Johannes	Abtastkopf und Verfahren zu dessen Herstellung
DE19917950A1 (de)	1999-04-21	2000-10-26	Heidenhain Gmbh Dr Johannes	Integrierter optoelektronischer Dünnschichtsensor und Verfahren zu dessen Herstellung
KR20070020133A (ko) *	2004-07-12	2007-02-16	미쓰비시덴키 가부시키가이샤	광학식 인코더

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS4829464A (nl) *	1971-08-17	1973-04-19

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE1911231A1 (de) *	1968-03-06	1970-02-12	Holotron Corp	Ultraschall-Mammograph
US3578979A (en) *	1968-04-23	1971-05-18	Tajima Seisakusho Kk	Electrical signal generating apparatus having a scale grid
GB1231029A (nl) *	1968-12-13	1971-05-05
GB1353470A (en) *	1970-10-19	1974-05-15	Post D	Position measuring apparatus utilizing moire fringe multiplication
US3812352A (en) *	1972-08-28	1974-05-21	Itek Corp	Encoder readout system

1975
- 1975-03-14 FR FR7508096A patent/FR2329972A1/fr active Granted
- 1975-03-14 JP JP50031737A patent/JPS6023282B2/ja not_active Expired
- 1975-03-14 NL NL7503103A patent/NL185178C/nl not_active IP Right Cessation
- 1975-03-14 DE DE19757508197 patent/DE7508197U/de not_active Expired
- 1975-03-14 DE DE19752511350 patent/DE2511350A1/de active Granted

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS4829464A (nl) *	1971-08-17	1973-04-19

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0218680U (nl) *	1988-07-19	1990-02-07
DE19701941B4 (de) *	1996-01-23	2016-01-14	Mitutoyo Corp.	Optischer Codierer
US7186969B2 (en)	2003-02-12	2007-03-06	Mitutoyo Corporation	Optical configuration for imaging-type optical encoders
US7435945B2 (en)	2003-02-12	2008-10-14	Mitutoyo Corporation	Optical configuration for imaging-type optical encoders
US7570433B2 (en)	2004-02-11	2009-08-04	Mitutoyo Corporation	Photoelectric encoder

Also Published As

Publication number	Publication date
NL185178C (nl)	1990-02-01
AU7911675A (en)	1976-09-16
FR2329972B1 (nl)	1982-03-26
NL7503103A (nl)	1975-09-17
JPS50136057A (nl)	1975-10-28
NL185178B (nl)	1989-09-01
DE7508197U (de)	1976-02-05
DE2511350A1 (de)	1975-10-09
DE2511350C2 (nl)	1987-06-04
FR2329972A1 (fr)	1977-05-27

Publication	Publication Date	Title
JPS63153408A (ja)	1988-06-25	相対変位測定装置
JPS6023282B2 (ja)	1985-06-06	相対変位測定装置
US6359691B2 (en)	2002-03-19	Device for measuring translation, rotation or velocity via light beam interference
US3768911A (en)	1973-10-30	Electro-optical incremental motion and position indicator
US8243279B2 (en)	2012-08-14	Displacement measurement apparatus
GB2194044A (en)	1988-02-24	Optical type displacement detecting device
JPH0781815B2 (ja)	1995-09-06	物理量を遠隔検出するためのオプトエレクトロニック検出装置
US4025197A (en)	1977-05-24	Novel technique for spot position measurement
JPH06109484A (ja)	1994-04-19	信号処理方法及びそれを用いたエンコーダ
US4049965A (en)	1977-09-20	Measurement apparatus
JPS58191907A (ja)	1983-11-09	移動量測定方法
WO1994011895A1 (en)	1994-05-26	Method and apparatus for measuring displacement
US5184014A (en)	1993-02-02	Opto-electronic scale reading apparatus
JPH046884B2 (nl)	1992-02-07
JP2718440B2 (ja)	1998-02-25	測長または測角装置
EP0486050B1 (en)	1998-02-04	Method and apparatus for measuring displacement
JP2503561B2 (ja)	1996-06-05	レ―ザ―干渉式エンコ―ダ
US5471302A (en)	1995-11-28	Interferometric probe for distance measurement utilizing a diffraction reflecting element as a reference surface
JP2675317B2 (ja)	1997-11-12	移動量測定方法及び移動量測定装置
JPH11118422A (ja)	1999-04-30	モアレ縞を用いた寸法測定装置
CN114353671B (zh)	2022-11-01	实现位移和角度同步测量的双波长衍射干涉***及方法
JPS62204126A (ja)	1987-09-08	エンコ−ダ−
JP2003307439A (ja)	2003-10-31	２次元エンコーダ
JPH0444211B2 (nl)	1992-07-21
JPH0411807B2 (nl)	1992-03-02