JPS60219637A - Surface smoothing method of magnetic disc - Google Patents
Surface smoothing method of magnetic discInfo
- Publication number
- JPS60219637A JPS60219637A JP7678384A JP7678384A JPS60219637A JP S60219637 A JPS60219637 A JP S60219637A JP 7678384 A JP7678384 A JP 7678384A JP 7678384 A JP7678384 A JP 7678384A JP S60219637 A JPS60219637 A JP S60219637A
- Authority
- JP
- Japan
- Prior art keywords
- head
- magnetic disc
- magnetic disk
- convex lens
- minute
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は磁気ディスク、特に高密度磁気ディスク（例え
ば、めっきまたはスパッタ法による薄膜媒体磁気ディス
ク）のごとき、高精度表面を要求されている磁気ディス
ク基板の表面平滑方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention is applicable to magnetic disks, particularly magnetic disks that require a high-precision surface, such as high-density magnetic disks (for example, thin-film magnetic disks made by plating or sputtering). The present invention relates to a method for smoothing the surface of a disk substrate.
（従来技術とその問題点）
一般に薄膜媒体磁気ディスクは、研磨仕上したＮ１−Ｐ
下地層の上に磁性薄膜として媒体（Ｎｉ −Ｃ。(Prior art and its problems) In general, thin film media magnetic disks are made of polished N1-P
A medium (Ni-C) is formed as a magnetic thin film on the underlayer.
−Ｐ）をめっきまたは媒体（α−Ｆｅ、 ０３）をスパ
ッタし、保護膜（例えば５ｆｆｉＯりを付与することに
よって製造されている。この場合、保護膜を形成した磁
気ディスク表面には高さ０．１μｍ以上の微小突起が存
在し、磁気ヘッドが摩耗劣化したシヘッド浮揚性が悪く
なる等の悪影響がある。-P) or by sputtering a medium (α-Fe, 03) and applying a protective film (for example, 5ffiO).In this case, the surface of the magnetic disk on which the protective film is formed has a height of 0. The presence of minute protrusions of .1 μm or more causes the magnetic head to deteriorate due to wear and tear, resulting in adverse effects such as deterioration of the head's flying ability.
これを解決するために、回転する磁気ディスク表面にラ
ッピングフィルムの砥粒面を接触させて、磁気ディスク
表面の微小突起を除去する方式（例えば時分 昭５６−
４６７６８）が従来採用されてい 。In order to solve this problem, a method was proposed in which the abrasive grain surface of the lapping film was brought into contact with the surface of the rotating magnetic disk to remove minute protrusions on the surface of the magnetic disk.
46768) was conventionally adopted.
る０
しかし、従来の方式では、ラッピングフィルムの砥粒面
が磁気ディスク表面に加圧接触して、磁気ディスク表面
を研磨加工していくので、微小突起のみ選択的に除去す
ることはできず１微小突起の存在しない保護膜部分も研
磨し除去してしまう欠点がある０このため、磁気ディス
クの保護膜厚さの不均一を生じ、磁気ディスクの耐久性
、耐食性が低下するという問題があった。However, in the conventional method, the abrasive grain surface of the lapping film comes into contact with the magnetic disk surface under pressure and polishes the magnetic disk surface, so it is not possible to selectively remove only minute protrusions1. This method has the disadvantage that it polishes and removes parts of the protective film where there are no microscopic protrusions.This causes unevenness in the thickness of the protective film on the magnetic disk, resulting in a decrease in the durability and corrosion resistance of the magnetic disk. .
（発明の目的）
本発明の目的は、このような従来の欠点にかんがみ、磁
気ディスク表面の微小突起のみを選択的に効率良く除去
できる磁気ディスクの表面平滑化方法を提供することに
ある０
（発明の構成）
本発明によれば、磁気ディスクを回転させ、該ディスク
面上を光線を集光する透明体を有したバーニラシーヘッ
ドを微小すきまで浮上させ１光線を該ディスク面上に照
射しながら、該ディスク面上の微小突起を除去すること
を特徴とする磁気ディスクの表面平滑化方法が得られる
。(Object of the Invention) In view of these conventional drawbacks, it is an object of the present invention to provide a method for smoothing the surface of a magnetic disk that can selectively and efficiently remove only minute protrusions on the surface of the magnetic disk. Structure of the Invention) According to the present invention, a magnetic disk is rotated, and a Verniracy head having a transparent body that focuses a light beam on the disk surface is floated to a minute gap to irradiate a single beam onto the disk surface. However, a method for smoothing the surface of a magnetic disk is obtained, which is characterized by removing minute protrusions on the disk surface.
（発明の概要） 本発明は上述の方法によシ、従来の問題点を解決した。(Summary of the invention) The present invention solves the conventional problems by the method described above.
すなわち、磁気ディスクを回転させ、該ディスク面上を
光線を集光する透明体を有したバーニクーヘッドを該デ
ィスク面上に存在する微小突起部高さよシ小さい値で浮
上させて、該透明体によって光線が該ディスク面上の微
小突起部の頂点に集光するように設定する。光線の照射
によって、微小突起部は溶融軟化し、直ちに該バー二シ
ェヘッドのスライダ面と衝突して微小突起は除去されて
いく。この場合、微小突起の存在しないディスク面上に
も光線は照射されるが、バーニラシーヘッドは磁気ディ
スク面上を微小すきまで浮上しているので、微小突起の
存在しないディスク面はバーニラシーヘッドとは接触し
ない。従って、本発明の磁気ディスクの表面平滑化方法
によ＃）１磁気ディスク表面の微小突起のみを選択的に
除去できる。That is, a magnetic disk is rotated, and a Bernico head having a transparent body that focuses light beams on the disk surface is floated at a height smaller than the height of the minute projections existing on the disk surface, and the transparent body is The setting is made such that the light beam is focused on the apex of the minute protrusion on the disk surface. By being irradiated with light, the microprotrusions are melted and softened, and immediately collide with the slider surface of the Burnisher head, and the microprotrusions are removed. In this case, the light beam is irradiated onto the disk surface where there are no microprotrusions, but since the verniracy head is floating above the magnetic disk surface to a microscopic gap, the disc surface where there are no microprotrusions is the verniracy head. do not touch. Therefore, by the method for smoothing the surface of a magnetic disk according to the present invention, only the minute protrusions on the surface of the magnetic disk can be selectively removed.
（実施例） 以下１本発明の実施例について図面を用いて説明する。(Example) An embodiment of the present invention will be described below with reference to the drawings.
磁気ディスクｌは薄膜媒体（Ｎｉ −Ｃｏ −Ｐ）メッ
キ後、保獲膜として８ｉ０．を厚さ０．０８μｍ付与し
たもので、その表面には微小突起２が存在している０バ
ーニツシユヘツド３はアルミナ材よりなシ、バーニッシ
ュヘッド３中に光線を集光させる透明体として平凸レン
ズ４（集魚距離ｆ二２１１１）を設けている。）シファ
イバ５を通して照射されたアルゴンレーザ光６（パワー
０．ＩＷ） ヲ平凸レンズ４によってスポットｊ１１１
Ｏμｍに集光させる０このような平凸レンズ４を備えた
ノく一ニッシュへ・ノド３を回転する磁気ディスク１面
上を微小突起高さよシ小さい値で浮上させながら、アル
ゴンレーザ光６を平凸レンズ４を通して磁気ディスク１
面上に照射すると、微小突起２は溶融軟化し、ノく一ニ
ッシュへノド３のスライダ面と衝突して除去され、磁気
ディスクｌの表面は平滑化される。この場合、バーニツ
クユヘッド３を数往復させながら、除徐にバーニッシュ
ヘッド３の浮上量を小さくシティく。実験によ“れば、
バーニラシー前の磁気ディスク面上の微小突起高さが（
１，１〜０．２５μｍ＝％つたものが、バーニッシュ後
、微小突起高さ力ｉ ０．０５μｆｆ１以下になシ、最
小浮上高さが０．１μｍ以下となった０本発明の方法で
は磁気ディスク面上の微ｌｊ−突起のみ除去され、微小
突起の存在しない磁気ティスフ面部分はバーニッシュさ
れないので、磁気ディスクの保護膜厚さに不均一を生じ
ること７！ｌ工なく、耐層性および耐食性が優れた磁気
ディスク力；獲イ尋できる０
また１本発明の方法では、集光された光線を照射して、
磁気ディスク面上の微小突起を溶融・軟 ：化させてお
シ、溶融・軟化して強度の低下した微小突起をバーニッ
シュヘッドのスライダ面に衝突させて除去しているので
、光線を照射しない場合に比較して、表面平滑化時間を
大幅に短縮できる □（本実施例の場合、約半分に短縮
）とともに、従来、除去できなかった硬質な微小突起も
容易に除去できる利点がある。After plating the magnetic disk I with a thin film medium (Ni-Co-P), a retention film of 8i0. The burnish head 3 has a thickness of 0.08 μm and has minute projections 2 on its surface. A convex lens 4 (fish collection distance f22111) is provided. ) Argon laser beam 6 (power 0.IW) irradiated through fiber 5 Spot j111 by plano-convex lens 4
To the Nokuichi Nishi equipped with such a plano-convex lens 4, the argon laser beam 6 is focused to a plane of 0 μm while floating the nod 3 above the surface of the rotating magnetic disk 1 at a value smaller than the height of the minute protrusion. Magnetic disk 1 through convex lens 4
When irradiated onto the surface, the microprotrusions 2 are melted and softened, and are removed by colliding with the slider surface of the throat 3 into the throat niche, and the surface of the magnetic disk l is smoothed. In this case, while reciprocating the burnish head 3 several times, the flying height of the burnish head 3 is gradually reduced. According to experiments,
The height of the microprotrusions on the magnetic disk surface before Bernilacy is (
1.1~0.25μm=% After burnishing, the microprotrusion height force i is less than 0.05μff1, and the minimum flying height is less than 0.1μm. Only the minute protrusions on the disk surface are removed, and the portion of the magnetic disk surface where no minute protrusions are present is not burnished, resulting in non-uniformity in the thickness of the protective film on the magnetic disk 7! Magnetic disk strength with excellent layer resistance and corrosion resistance without any effort;
The microprotrusions on the magnetic disk surface are melted and softened, and the microprotrusions whose strength has decreased due to melting and softening are removed by colliding with the slider surface of the burnish head, so no light is irradiated. In addition to being able to significantly shorten the surface smoothing time (by about half in the case of this example), it also has the advantage that hard microprotrusions that could not be removed conventionally can be easily removed.
（発明の効果）
以上説明したように、磁気ディスクを回転させ、該磁気
ディスク面上を光線を集光する透明体を有したバーニッ
シュヘッドを微小すきまで浮上させ、光線を該ディスク
面上に照射しながら、該ディスク面上の微小突起を除去
する方法により、短時間に磁気ディスクの表面平滑化が
達成され、磁気ディスクの耐久性、耐食性を低下させる
ことなくヘッド浮上性を著しく改善できる利点がある０
なお、本発明の一実施例においては、バーニツシュヘッ
ド中に光線を集光させる透明体を設けたが、バーニラシ
ーヘッド自体を硬質の透明体としても良い０また、光線
としてアルゴンレーザ光を用いたが、炭酸ガスレーザ光
、ＹＡＧレーザ光等を用いても良い。(Effects of the Invention) As explained above, a magnetic disk is rotated, a burnish head having a transparent body that focuses a light beam on the magnetic disk surface is floated to a minute gap, and a light beam is directed onto the disk surface. By removing minute protrusions on the disk surface while irradiating the disk, the surface of the magnetic disk can be smoothed in a short time, and the head flying ability can be significantly improved without reducing the durability and corrosion resistance of the magnetic disk. There is 0
In one embodiment of the present invention, a transparent body was provided in the burnishing head to condense the light beam, but the burnishing head itself may be made of a hard transparent body.Also, argon laser light may be used as the light beam. However, carbon dioxide laser light, YAG laser light, etc. may also be used.
Claims (1)
する透明体を有したバーニッシュヘッドを微小すきまで
浮上させ、該ディスク面上に光線を耶射しながら該ディ
スク面上の微小突起を除去することを特徴とする磁気デ
ィスクの表面平滑化方法。The magnetic disk is rotated, and a burnish head having a transparent body that focuses light beams on the disk surface is floated up to a minute gap, and while the light beams are directed onto the disk surface, minute protrusions on the disk surface are formed. A method for smoothing the surface of a magnetic disk, the method comprising: removing the surface of the magnetic disk;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7678384A JPS60219637A (en) | 1984-04-17 | 1984-04-17 | Surface smoothing method of magnetic disc |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7678384A JPS60219637A (en) | 1984-04-17 | 1984-04-17 | Surface smoothing method of magnetic disc |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60219637A true JPS60219637A (en) | 1985-11-02 |
Family
ID=13615196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7678384A Pending JPS60219637A (en) | 1984-04-17 | 1984-04-17 | Surface smoothing method of magnetic disc |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60219637A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5043835A (en) * | 1987-03-09 | 1991-08-27 | Matsushita Electric Industrial Co., Ltd. | Method and apparatus for adjusting the position of a magnetic head relative to a recording medium |
| US6394105B1 (en) * | 1998-03-19 | 2002-05-28 | Seagate Technology, Inc. | Integrated laser cleaning and inspection system for rigid thin film media for magnetic recording application |
-
1984
- 1984-04-17 JP JP7678384A patent/JPS60219637A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5043835A (en) * | 1987-03-09 | 1991-08-27 | Matsushita Electric Industrial Co., Ltd. | Method and apparatus for adjusting the position of a magnetic head relative to a recording medium |
| US6394105B1 (en) * | 1998-03-19 | 2002-05-28 | Seagate Technology, Inc. | Integrated laser cleaning and inspection system for rigid thin film media for magnetic recording application |
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