JP3126164B2 - Processing method of magnetic head slider - Google Patents
Processing method of magnetic head sliderInfo
- Publication number
- JP3126164B2 JP3126164B2 JP03117836A JP11783691A JP3126164B2 JP 3126164 B2 JP3126164 B2 JP 3126164B2 JP 03117836 A JP03117836 A JP 03117836A JP 11783691 A JP11783691 A JP 11783691A JP 3126164 B2 JP3126164 B2 JP 3126164B2
- Authority
- JP
- Japan
- Prior art keywords
- slider
- base material
- processing
- back surface
- processing method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ハードディスク等に情
報を読み書きさせる磁気ヘッドの上面形状を凸状に形成
する、いわゆるクラウン形状加工方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a so-called crown shape processing method for forming a convex top surface of a magnetic head for reading and writing information on a hard disk or the like.
【０００２】[0002]
【従来の技術】従来の磁気ヘッドスライダ（以下スライ
ダ）の加工方法について、図７、８、９を用いて説明す
る。2. Description of the Related Art A conventional magnetic head slider (hereinafter, slider) processing method will be described with reference to FIGS.
【０００３】まず、図７に示されるように、スライダ基
材２の表面２ａを治具３に接着し、所定のバックハイト
（特に図示はしないが、ギャップのエーペックスから裏
面までの距離）を形成すべく裏面２ｂを加工する。次
に、スライダ基材２の接着を解き、前の加工時とは逆に
スライダ基材２の裏面２ｂを治具５に接着し、図８に示
されるノーズ部４を形成するためのトレーリング加工を
施す。そして、図９に示されるように表溝６ｃを形成す
るとともに、個々のスライダ６に切断する。その後、所
定のポールハイトを形成すべくスライダの上面６ａを研
削する。なお、ここでは、主要な加工のみ説明し、面取
り加工、ポリッシュ、洗浄等については説明を省略して
いる。First, as shown in FIG. 7, a front surface 2a of a slider base material 2 is bonded to a jig 3 to form a predetermined back height (not shown, but a distance from an apex of a gap to a back surface). The back surface 2b is processed as needed. Next, the bonding of the slider substrate 2 is released, and the back surface 2b of the slider substrate 2 is bonded to the jig 5 in reverse to the previous processing, and the trailing for forming the nose portion 4 shown in FIG. Apply processing. Then, as shown in FIG. 9, a front groove 6c is formed, and the slider 6 is cut into individual sliders 6. Thereafter, the upper surface 6a of the slider is ground to form a predetermined pole height. Here, only the main processing will be described, and description of the chamfering processing, polishing, cleaning, and the like will be omitted.
【０００４】さらにその後、スライダの上面形状を凸状
に形成するには、例えば、特開平１ー３０１０４９号公
報に見られるような方法で加工が施されている。この方
法は、機械的あるいは化学的作用により治具を変形させ
て、その治具に接着させた被加工物を加工するというも
のである。[0004] Thereafter, in order to form the upper surface of the slider in a convex shape, processing is performed, for example, by a method as disclosed in Japanese Patent Application Laid-Open No. Hei 1-301049. According to this method, a jig is deformed by mechanical or chemical action, and a workpiece adhered to the jig is processed.
【０００５】[0005]
【発明が解決しようとする課題】上記説明から明らかな
ように、従来の加工方法では、スライダの上面形状を凸
状に形成するためには、そのための工程が別途に必要で
あった。そこで、本発明の目的は、スライダの上面形状
を凸状に形成するための工程を別途に設けることなく、
スライダの上面形状を平面に加工する通常の工程と同等
の工程で加工可能な加工方法を提供することにある。As is apparent from the above description, in the conventional processing method, a separate step is required to form the upper surface of the slider in a convex shape. Therefore, an object of the present invention is to provide a process for forming a top surface of a slider in a convex shape without providing a separate step.
It is an object of the present invention to provide a processing method capable of processing a slider in the same process as a normal process of processing a top surface shape of a slider into a flat surface.
【０００６】[0006]
【課題を解決するための手段】この目的を達成するため
に、本発明は、スライダ基材の裏面を加工する際に、ス
ライダ基材の短手方向の断面形状が弓形の微小凹状にな
るように裏面を加工し、その後、従来の工程に従って加
工する。In order to achieve this object, the present invention provides a method of processing a slider substrate, in which the slider substrate has an arcuate minute concave cross-sectional shape in the lateral direction when the slider substrate is processed. , And then processed according to the conventional process.
【０００７】[0007]
【作用】図１に示されるように、スライダ基材１０の裏
面１０ｂを、スライダ機材の短手方向（図７の矢印方
向）の断面形状が弓形の微小凹状になるように加工した
後、スライダ基材１０の治具２０への接着を解除する。
その後、図２に示されるように、スライダ基材の裏面１
０ｂを治具２０に接着させる。接着剤が冷却され収縮す
ると、図３に示されるように、スライダ基材の表面１０
ａは、スライダ基材の短手方向の断面形状が弓形の微小
凹状になる。そして、斜線で示している部分を除去し、
表面１０ａを平面にする。その後、スライダ基材１０の
治具２０への接着を解除すると、スライダ基材１０にか
けられていた応力も解除され、図４に示されるように、
裏面１０ａは微小凸状になる。As shown in FIG. 1, after the back surface 10b of the slider base material 10 is processed so that the cross-sectional shape of the slider device in the short direction (the direction of the arrow in FIG. 7) becomes a small arcuate concave shape, The adhesion of the base material 10 to the jig 20 is released.
Thereafter, as shown in FIG.
0b is bonded to the jig 20. As the adhesive cools and shrinks, as shown in FIG.
In the case of “a”, the cross-sectional shape of the slider base material in the lateral direction is a minute concave shape having an arcuate shape. Then, remove the shaded parts,
The surface 10a is made flat. After that, when the adhesion of the slider base material 10 to the jig 20 is released, the stress applied to the slider base material 10 is also released, and as shown in FIG.
The back surface 10a has a minute convex shape.
【０００８】[0008]
【実施例】以下、本発明による一実施例を図面を基に説
明する。図５に示すように、スライダ基材１０の裏面１
０ｂを加工する際に、スライダ基材１０の送り方向（矢
印で図示）に対し垂直な方向からθだけ磁石軸１２を傾
けて加工した。具体的には、直径１００ｍｍのカップ型
砥石を用い、θを約０．７度として加工したところ、ス
ライダ基材１０の短手方向全体（約４ｍｍ）に渡って、
約１μｍの弓形の微小凹状面が形成された。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment according to the present invention will be described below with reference to the drawings. As shown in FIG.
When machining 0b, the magnet shaft 12 was inclined by θ from a direction perpendicular to the feed direction of the slider base 10 (shown by an arrow). Specifically, when processing was performed by using a cup-type grindstone having a diameter of 100 mm and θ was set to about 0.7 degrees, the entire length of the slider substrate 10 in the short direction (about 4 mm) was obtained.
An arcuate micro concave surface of about 1 μm was formed.
【０００９】裏面１０ｂをこのように形成した後、従来
の工程にしたがって加工した。なお、「従来の技術」の
項では説明を省略したが、最終的には上面１０ａをポリ
ッシュ仕上げしている。そして、接着を解除し、個々の
スライダの表面形状を測定したところ、約１０〜４０ｎ
ｍの弓形の微小凸状面が形成されいた。After the back surface 10b is formed in this manner, it is processed according to a conventional process. Although the description is omitted in the section of "Prior Art", the upper surface 10a is finally polished. Then, the adhesion was released and the surface shape of each slider was measured.
An arcuate small convex surface of m was formed.
【００１０】また、裏面１０ｂの凹量を変えて加工を行
なったところ、図６に示される結果が得られた。これに
よると、凹量の変化に対してはほぼ線形に変化すること
が確かめられた。従って、各種の表面凸量（クラウン
量）に対し、図３からそれぞれ所要の裏面凹量を決定し
て加工を行うことができる。When the processing was performed by changing the concave amount of the back surface 10b, the result shown in FIG. 6 was obtained. According to this, it was confirmed that the change in the concave amount changed almost linearly. Therefore, for various surface convex amounts (crown amounts), processing can be performed by determining the required back surface concave amounts from FIG.
【００１１】なお、スライダ基材の裏面を弓形の微小凹
状に加工する方法は、本実施例で行なった方法の他に
も、例えば、成形研削盤を用いた加工等でももちろん良
い。しかしながら、本実施例で行なったように、砥石軸
を傾けてスライダ裏面を凹状に加工する方法によれば、
１〜数μｍ程度の極微小量にもかかわらずきれいな形状
に仕上げることができる。The method of processing the back surface of the slider base material into an arcuate concave shape may be, for example, processing using a forming grinder, in addition to the method performed in this embodiment. However, according to the method of processing the slider back surface into a concave shape by inclining the grindstone axis as performed in the present embodiment,
Despite the extremely small amount of about 1 to several μm, it can be finished in a beautiful shape.
【００１２】また、説明に用いたスライダの形状はノー
ズを有しているが、本発明はノーズの有無に関係なく適
用可能である。Although the slider used in the description has a nose, the present invention is applicable regardless of the presence or absence of the nose.
【００１３】[0013]
【発明の効果】以上説明したように、本発明による加工
方法は、スライダ基材の裏面を加工する際に、スライダ
基材の短手方向の断面形状が弓形の微小凹状になるよう
に裏面を加工するだけで、スライダの上面形状を凸状に
形成することができるので、スライダの上面形状を凸状
に形成するための別途工程を設ける必要がない。よっ
て、スライダの上面形状を平面に加工する通常の工程と
同等の工程で、加工が可能となる。As described above, according to the processing method of the present invention, when processing the back surface of the slider base material, the back surface of the slider base material is formed so that the cross-sectional shape in the short direction becomes a small arcuate concave shape. Since the top surface of the slider can be formed in a convex shape only by processing, it is not necessary to provide a separate step for forming the top surface of the slider in a convex shape. Therefore, the processing can be performed in the same step as the normal step of processing the upper surface shape of the slider into a flat surface.
【００１４】また、砥石軸を傾けてスライダ裏面を凹状
に加工すれば、１μｍ程度の極微小量にもかかわらずき
れいな形状に仕上げることができる。If the back surface of the slider is machined into a concave shape by inclining the grindstone shaft, a beautiful shape can be finished despite its extremely small amount of about 1 μm.
【図１】本発明の作用の説明図である。FIG. 1 is an explanatory diagram of the operation of the present invention.
【図２】本発明の作用の説明図である。FIG. 2 is an explanatory diagram of the operation of the present invention.
【図３】本発明の作用の説明図である。FIG. 3 is an explanatory diagram of the operation of the present invention.
【図４】本発明の作用の説明図である。FIG. 4 is a diagram illustrating the operation of the present invention.
【図５】本発明による実施例の説明図である。FIG. 5 is an explanatory diagram of an embodiment according to the present invention.
【図６】本実施例の結果を示すグラフである。FIG. 6 is a graph showing the results of this example.
【図７】従来の加工方法の説明図である。FIG. 7 is an explanatory view of a conventional processing method.
【図８】従来の加工方法の説明図である。FIG. 8 is an explanatory view of a conventional processing method.
【図９】従来の加工方法の説明図である。FIG. 9 is an explanatory view of a conventional processing method.
２ スライダ基材 ２ａ スライダ基材表面 ２ｂ スライダ基材裏面 １０ スライダ基材 １０ａ スライダ基材表面 １０ｂ スライダ基材裏面 2 Slider base material 2a Slider base surface 2b Slider base surface 10 Slider base material 10a Slider base surface 10b Slider base surface
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) B24B 19/26 G11B 5/127 G11B 5/187 G11B 5/60 G11B 21/21 101 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 7 , DB name) B24B 19/26 G11B 5/127 G11B 5/187 G11B 5/60 G11B 21/21 101
Claims (2)
定のバックハイトを形成すべく裏面を加工し、スライダ
基材の接着を解除し、スライダ基材の裏面を治具に接着
し、ノーズ部を形成するための加工を施し、表溝を形成
し、個々のスライダに切断し、所定のポールハイトを形
成すべくスライダの上面を研削し、さらに、スライダの
上面形状を凸状に形成してなる磁気ヘッドスライダの加
工方法において、前記スライダ基材の裏面を加工する際
に、スライダ基材の短手方向の断面形状が弓形の微小凹
状になるように裏面を加工することを特徴とする磁気ヘ
ッドスライダの加工方法。 A surface of a slider base material is adhered to a jig.
Process the back surface to form a constant back height
Release the base material and bond the back of the slider base material to the jig
Process to form the nose and form the surface groove
And cut into individual sliders to form the required pole height.
Grind the top surface of the slider to
A magnetic head slider with a convex upper surface
In processing method, when processing the back surface of the slider base material
And processing the back surface of the slider base material so that the cross-sectional shape in the short direction of the slider base material is a minute concave shape in an arc shape .
軸を前記スライダ基材の送り方向に対して傾けて取り付
けて行なうことを特徴とする請求の範囲第１項記載の磁
気ヘッドスライダの加工方法。The back surface of the processing according to claim 2, wherein the slider substrate, the magnetic head slider ranging first claim of claim, wherein the performing attached by tilting the grinding wheel axis with respect to the feed direction of the slider base member Processing method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03117836A JP3126164B2 (en) | 1991-04-23 | 1991-04-23 | Processing method of magnetic head slider |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03117836A JP3126164B2 (en) | 1991-04-23 | 1991-04-23 | Processing method of magnetic head slider |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH068125A JPH068125A (en) | 1994-01-18 |
| JP3126164B2 true JP3126164B2 (en) | 2001-01-22 |
Family
ID=14721457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP03117836A Expired - Fee Related JP3126164B2 (en) | 1991-04-23 | 1991-04-23 | Processing method of magnetic head slider |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3126164B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2790043B2 (en) * | 1994-06-03 | 1998-08-27 | ヤマハ株式会社 | Manufacturing method of magnetic head |
-
1991
- 1991-04-23 JP JP03117836A patent/JP3126164B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH068125A (en) | 1994-01-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |