JPS5932368B2 - Alignment device for plate-shaped members - Google Patents
Alignment device for plate-shaped membersInfo
- Publication number
- JPS5932368B2 JPS5932368B2 JP5894479A JP5894479A JPS5932368B2 JP S5932368 B2 JPS5932368 B2 JP S5932368B2 JP 5894479 A JP5894479 A JP 5894479A JP 5894479 A JP5894479 A JP 5894479A JP S5932368 B2 JPS5932368 B2 JP S5932368B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- alignment
- cassette
- guide
- shaped members
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Feeding Of Articles To Conveyors (AREA)
Description
【発明の詳細な説明】
この発明は板状部材、特に転動可能な、例えばシリコン
ウェハ、ガラスウェハなどの円板状部材を、整列治具に
形成された所定ピッチ毎の細溝間に直立支持させるため
の整列装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention is a method of aligning plate-like members, particularly rollable disk-like members such as silicon wafers and glass wafers, between narrow grooves formed at predetermined pitches in an alignment jig. The present invention relates to an alignment device for supporting.
5 例えば、IC、トランジスタ、サイリスタなどの半
導体装置は、よく知られているよウに、円形をなすウエ
ー・に対し、拡散、写真製版などの処理を繰ク返し施す
ことによつて形成される。5 For example, semiconductor devices such as ICs, transistors, and thyristors are formed by repeatedly performing processes such as diffusion and photolithography on circular wafers, as is well known. .
そして特に拡散処理については、一般にバッチ処理され
10ることが多く、このパッチ処理のためには、前記ウ
エー・を各々に直立支持させるところの、l組づつの細
溝を所定ピッチ毎に多数形成させた石英、SiC、ポリ
シリコンなどからなる整列治具、いわゆる拡散ボートが
使用される。15しかして従来、この拡散ボートヘのウ
ェハのローディングおよびアンローディングは、第1図
に示すようにして行なわれていた。Particularly regarding diffusion processing, batch processing is often carried out, and for this patch processing, a large number of l sets of narrow grooves are formed at a predetermined pitch, each of which supports each of the wafers upright. A so-called diffusion boat, which is an alignment jig made of quartz, SiC, polysilicon, etc., is used. 15 Conventionally, however, loading and unloading of wafers into the diffusion boat was performed as shown in FIG.
すなわち、この第1図において、1は拡散ボート、2a
、2bはこの拡散ボート1に所定ピッチ毎に多数形成さ
れ加 たl組づゝの細溝、1はウェハの工程間搬送に使
用するカセット、4a、4bはこのカセット旦に同様に
所定ピッチ毎に多数形成された1組づゝの細溝、iはウ
エ・・、6は先端一側に真空吸着日をもつ真空ピンセッ
トであり、拡散ボート1から力25セットlへの、また
カセット1から拡散ボートLへのウェハ5の移し替えは
、すべて真空ピンセット6による吸着、その他通常のピ
ンセットによる挾持によりなされている。そして特にカ
セット1から拡散ボート1へのウn エー・ 5の移し
替えに際しては、l回の処理ウエー・量を多くし、かつ
均一な拡散を行なうために、第2図に示すように、ウエ
ー・1の裏面相互を狭い間隙Aまで近付けた状態で装入
する場合があるが、このような場合には、一般にカセッ
ト内でのウエ35−・ 5が、その表裏をあらかじめ一
定方向に揃えて収容してあるために、l枚を移し替える
度毎に、表裏を交互に反転させなければならず注意が必
要で、1つの工程毎にこれを繰ク返すのは膨大な手間と
なり、極めて煩雑な作業となるばか9か、移し替えには
ウェハ面を一々吸着し、あるいは挟むために損傷も多く
、かつ人手の介入によりウエー・表面の汚染もあつて、
製造歩留vが低下するという欠点があつた。That is, in this FIG. 1, 1 is a diffusion boat, 2a is
, 2b are l sets of thin grooves formed in large numbers at predetermined pitches in this diffusion boat 1, 1 is a cassette used for transporting wafers between processes, and 4a and 4b are grooves formed in this cassette at predetermined pitches. 1 set of narrow grooves formed in large numbers on the wafer, 6 is a vacuum tweezers with a vacuum suction point on one side of the tip, and the force from the diffusion boat 1 to the force 25 set l, and from the cassette 1 to The wafers 5 are transferred to the diffusion boat L by suction with vacuum tweezers 6 or by clamping with other ordinary tweezers. In particular, when transferring the air 5 from the cassette 1 to the diffusion boat 1, in order to increase the number of wafers per process and to achieve uniform diffusion, a wafer is used as shown in Fig. 2.・There are cases where the back sides of wafers 35 and 5 are loaded close to each other to the narrow gap A, but in such cases, the wafers 35-5 in the cassette are generally aligned in advance with their front and back sides aligned in a certain direction. Because the paper is stored in a container, care must be taken to alternately turn the front and back sides each time a sheet is transferred, and repeating this for each process requires a huge amount of effort and is extremely complicated. This is a tedious process, and the wafer surfaces are often damaged by suctioning or pinching them one by one during transfer, and the wafers and surfaces are often contaminated due to manual intervention.
There was a drawback that the manufacturing yield v decreased.
この発明は従来のこのような実情に鑑み、カセット内に
表裏を一定方向に揃えて収容したウエー・などの転動可
能な円板状部材乞拡,散ボートなどの整列治具上の細溝
間に,表裏を交互にした状態で、しかも各部材面に他物
を接触させないで、自動的に整列して直立支持させるた
めの装置を提供しようとするものである。In view of the above-mentioned conventional circumstances, the present invention has been developed to expand a rollable disc-shaped member such as a way, which is housed in a cassette with the front and back aligned in a certain direction, and to expand the narrow groove on an alignment jig such as a scattering boat. It is an object of the present invention to provide a device for automatically aligning and supporting the members upright, with the front and back sides alternated, and without any other object coming into contact with each member surface.
以下この発明装置の実施例につき、第3図ないし第6図
を参照して詳細に説明する。Embodiments of the apparatus of the present invention will be described in detail below with reference to FIGS. 3 to 6.
これらの第3図ないし第6図において、前記第1図と同
一符号は同一または相当部分を示してお9、第3図ない
し第5図は一実施例装置、第6図は他の実施例装置を各
々に表わしている。In these FIGS. 3 to 6, the same reference numerals as in FIG. Each represents a device.
第3図ないし第5図の一実施鍔装置において、前記カセ
ット3.を定位置に保持するカセット移動機構Lと、前
記拡散ボート1をカセット受け8a上の定位置に保持す
る拡散ボート移動装置8とべ各々にこれらの細溝4a,
4bおよび2a,2b毎にピッチ送りできるようにした
機能を備えてお勺、これらの両機構L,J間には、各々
に保持されているカセットJおよび拡散ボート1の各細
溝4a,4bおよび2b,2b位置に臨ませて、カセッ
ト側から垂直方向に立上9、かつその立上D位置から下
方に傾斜して拡散ボート側に延長されると共に、内側に
相対向してウエ・・周縁部を案内するv字状溝10a,
10bを形成した案内部材9.を設置してある。In one embodiment of the flange device of FIGS. 3 to 5, the cassette 3. The cassette moving mechanism L that holds the diffusion boat 1 in a fixed position, the diffusion boat moving device 8 that holds the diffusion boat 1 in a fixed position on the cassette receiver 8a, and the narrow grooves 4a,
Between these two mechanisms L and J, there is a cassette J held in each and a narrow groove 4a, 4b of the diffusion boat 1. 2b, facing the 2b position, vertically rising from the cassette side 9, and extending downward from the rising position D toward the diffusion boat side, facing inwardly, and wa... a v-shaped groove 10a that guides the peripheral edge;
Guide member 9 formed with 10b. has been installed.
また前記カセット盈の下方には、そのピッチ送り毎に内
部の細溝4a,4bに収容されたウエ・・5.を立上ク
位置まで突き上げるための、昇降プレート12とその昇
降機構11とを配置してあジ、かつ前記案内部材湿の傾
斜側途上には、同一断面形状でウエー・径よ)も長くし
た反転部材13が、反転機構14により同位置で左右方
向を反転できるよりに介在させてあり、この反転部材1
3の左右方向、すなわち人口側、出口側に各々シリンダ
17,18で出没自在としたストッパピン15,16を
設けると共に、この反転部材13位置から前記拡散ボー
ト1への支持位置まで、ウエ・・1の転動を支えて案内
するための、周囲に■字状溝20を形成した案内ロール
19が、アーム21に支持されて長孔22から案内部材
廷側に突き出されており、これをロッド23を介して往
復機構24に連繋させたものである。Further, at the bottom of the cassette cap, the wafers accommodated in the internal narrow grooves 4a, 4b for each pitch feed.5. The elevating plate 12 and its elevating mechanism 11 are arranged in order to push up the guide member to the rising position, and the guide member has the same cross-sectional shape and a longer way/diameter in the middle of the inclined side of the guide member. A reversing member 13 is interposed so that the reversing mechanism 14 can reverse the left and right direction at the same position, and this reversing member 1
Stopper pins 15 and 16 are provided in the left and right direction of 3, that is, on the population side and the exit side, respectively, and are movable in and out by cylinders 17 and 18. A guide roll 19 with a ■-shaped groove 20 formed around the periphery to support and guide the rolling motion of the roller 1 is supported by an arm 21 and protrudes from a long hole 22 toward the guide member court. It is connected to the reciprocating mechanism 24 via 23.
従つて以上の第3図ないし第5図実施例においては、ま
ずカセットおよび拡散ボート各移動機構1,8.によう
、カセット盈および拡散ボート1の各構溝4a,4bお
よび2a,2bを、各々に案内部材旦の■字状溝10a
,10bの両開口端に一致させ、かつ案内ロール19を
反転部材13に近付けてセットさせると共に、ストッパ
ピン15を突出、ストッパピン16を引き込めておく。Therefore, in the embodiments of FIGS. 3 to 5 described above, the cassette and diffusion boat moving mechanisms 1, 8. As shown in FIG.
, 10b, the guide roll 19 is set close to the reversing member 13, the stopper pin 15 is protruded, and the stopper pin 16 is retracted.
ついでこの初期セット状態から、昇降機構11を起動し
て昇降プレート12を上昇させると、この上昇によりカ
セット盈内の最初のウェハ旦は、その周縁部がV字状溝
10a,10bに合わされたま\で、立上勺位置の最上
部に至つて案内部材Jの傾斜に沿い転動降下を始め、反
転部材13の位置に達してストッパピン15によう一旦
停止され、かつこの状態でストッパピン16もまた突出
される。しかしてこのように転動降下されてくるウェハ
jが、反転部材13に達してその人口側および出口側に
突出した各ストッパピン15,16により支えられると
、反転機構14が作動されて、人口側および出口側が相
互に反対側に反転、すなわちウエ・・δが表裏を反対側
に人れ替えられる。Next, from this initial set state, when the elevating mechanism 11 is activated to raise the elevating plate 12, the first wafer in the cassette can be lifted up with its peripheral edge aligned with the V-shaped grooves 10a and 10b. Then, when it reaches the top of the rising position, the guide member J starts rolling down along the slope, reaches the position of the reversing member 13, and is temporarily stopped by the stopper pin 15, and in this state, the stopper pin 16 is also It also stands out. However, when the wafer j that is rolled down in this way reaches the reversing member 13 and is supported by the stopper pins 15 and 16 that protrude toward the population side and the exit side, the reversing mechanism 14 is activated and the population The side and the exit side are reversed to opposite sides, that is, the wafer...δ is switched from front to back to the opposite side.
ついでこの反転動作終了後に、今度は出口側となつたス
トッパピン16が引き込まれて、これにより一旦停止さ
れていたウエー・jの拘束が解かれ、このウエー・旦は
待機している案内ロール19に接し、各々のV字状溝1
0a,10bおよび20にその周縁部が合わされたま\
で、往復機構24の作動と共に、この案内ロール19に
支えられて再度転動を始め、拡散ボート1上に移し替え
られ、その細溝2a,2b間に・直立支持されることに
なる。そしてこのように最初のウエー・5が拡散ボート
1上に移し替えられると、案内ロール19は拡散ボート
1を過ぎたところにしばらくととまク、かつ前記昇降プ
レート12はその間に元位置に復帰されてお勺、この状
態で両移動機構7,8が作動して、各々のカセットJお
よび拡散ボート1を1ピッチ送9した上で、前記案内ロ
ール19もまた元位置に復帰させておく。続いて次の同
様な作動が行な れるが、前回動作でウエ・・δは反転
操作されているから、今回は反転を必要としないことに
なう、両ストッパピン15,16を共に引き込ませたま
\にしておいて、前回と同様にカセットJからウェハ1
を上昇させると、このウエー・1は反転部材13の位置
で何等の作用も受けずに案内部材艮内を転動降下し、待
機している案内ロール19に突当つて支えられ、一旦停
止されたのちに、この案内ロール19の移動々作で前記
と同様にこのウェハ、すなわち今度は反転されていない
ウエ・・5を、前回の反転されたウエ・・)に近付けた
隣接位置を占めているところの、拡散ボート1上の細溝
2a,2b間に直立支持させるのであ沢以下同様の操作
を繰り返して、カセットJ内に表裏を一定方向に揃えて
収容したウェハS.を、拡散ボート1にその表裏が交互
になるようにして、順次かつ自動的に移し替えることが
できるのである。Then, after this reversal operation is completed, the stopper pin 16 on the exit side is retracted, thereby releasing the restraint of the way j that was once stopped, and the guide roll 19 that is waiting on the way j. in contact with each V-shaped groove 1
0a, 10b and 20 with their peripheral edges aligned\
Then, along with the operation of the reciprocating mechanism 24, it starts rolling again supported by the guide roll 19, and is transferred onto the diffusion boat 1, where it is supported upright between the narrow grooves 2a and 2b. When the first way 5 is transferred onto the diffusion boat 1 in this way, the guide roll 19 stops for a while past the diffusion boat 1, and the lifting plate 12 returns to its original position during that time. In this state, both moving mechanisms 7 and 8 are operated to move each cassette J and diffusion boat 1 one pitch 9, and then the guide roll 19 is also returned to its original position. Subsequently, the next similar operation is performed, but since the wafer .delta. has been reversed in the previous operation, reversal is not necessary this time, and both stopper pins 15 and 16 are pulled in together. Leave it in the cassette and place wafer 1 from cassette J as before.
When the way 1 is raised, the way 1 rolls down within the guide member at the position of the reversing member 13 without receiving any action, hits the waiting guide roll 19, is supported, and is temporarily stopped. Later, by the movement of the guide roll 19, this wafer (this time the uninverted wafer...5) is brought closer to and adjacent to the previously inverted wafer (5) in the same manner as before. The wafer S. is placed vertically between the narrow grooves 2a and 2b on the diffusion boat 1, and the same operation is repeated to place the wafer S. can be sequentially and automatically transferred to the diffusion boat 1 with the front and back sides alternated.
また第6図は前記反転操作の別の実施例であシ、この例
では、前記反転部材13に相当する反転部材25を、こ
れには前例のようなストッパピン15,16を設けずに
、案内円筒26に内装させた上で、反転機構27により
反転可能とさせると共に、この案内円筒26を前記案内
部材Jの途上に、その人口側および出口側スリット28
a,28bが一致するようにして介在させ、かつ出口側
スリット28b部分に対してシリンダ30で出没自在と
したストンパピン29を設けたものであジ、この第6図
実施例では、転動降下してくるウエー・δの一旦停止と
、その拘束解放とをストッパピン29の出没操作によつ
て行ない、かつ反転部材25内での抜け出しを案内円筒
26の内周面で行なうようにし、前例と同様の作用を得
るものである。FIG. 6 shows another embodiment of the reversing operation, and in this example, a reversing member 25 corresponding to the reversing member 13 is provided without the stopper pins 15 and 16 as in the previous example. The guide cylinder 26 is installed inside the guide cylinder 26 and is made to be inverted by a reversing mechanism 27, and the guide cylinder 26 is provided with slits 28 on the population side and the outlet side in the middle of the guide member J.
A and 28b are interposed so that they coincide with each other, and a stomper pin 29 is provided which can freely protrude and retract from the outlet side slit 28b portion using a cylinder 30. In the embodiment shown in FIG. The coming way δ is temporarily stopped and its restraint is released by operating the stopper pin 29 to protrude and retract, and the coming out of the reversing member 25 is performed on the inner circumferential surface of the guide cylinder 26, similar to the previous example. This is to obtain the effect of
なお前記各実施例では、円板状部材として円形状のウェ
ハiを苅尿としているが、一部に基準面をもつウエー・
であつても、あるいは転動可能な薄板であれば任意形状
のものにも適用できることは勿論である。以上詳述した
ようにこの発明によるときは、カセット内に表裏を一定
方向に揃えて収容したウエー・などの円板状部材を、拡
散ボートなどの整列治具に形成した構溝間に、その表裏
を交互にして自動的に移し替えることができ、しかもこ
の転動可能な円板状部材の移し替えに際しては、部材の
移動をその周縁面による転動によシ行なわせ、かつ部材
各面に全く触れずに実行するから、円板状部材が損傷し
たv、あるいは汚染されたりする危険もなく、その作業
を円清、かつ迅速に行ない得られ、ウエ・・などの製造
歩留勺を向上できるなどの特長を有するものである。In each of the above embodiments, the circular wafer i is used as a disc-shaped member, but a wafer i having a reference surface in a part may also be used.
Of course, it can be applied to any shape as long as it is a rollable thin plate. As described in detail above, according to the present invention, a disc-shaped member such as a way, which is housed in a cassette with its front and back aligned in a certain direction, is placed between the grooves formed in an alignment jig such as a diffusion boat. It is possible to automatically transfer the front and back sides alternately, and when transferring this rollable disk-shaped member, the movement of the member is performed by rolling on its peripheral surface, and each side of the member Because the work is carried out without touching the disk at all, there is no risk of damage or contamination of the disc-shaped member, and the work can be done cleanly and quickly, increasing production yields such as wafers. It has the advantage of being able to improve performance.
第1図および第2図は従来例によるウェハの整列治具へ
の移し替え作業を説明する斜視図および一部拡大正面図
、第3図はこの発明に係わる円板状部材の整列装置の一
実施例を示す斜視図、第4図は同上要部の部分正面図、
第5図は同上案内、反転部材の断面図、第6図は同上他
の実施例の要部を示す斜視図である。
1・・・・・・拡散ボート、2a,2b・・・・・・細
溝、l・・・・・・カセット、4a,4b・・・・・・
細溝、5・−・・・・ウエー・1,8.・・・・・・移
動機構、J・・−・・一案内部材、10a,10b・・
・・・・V字状溝、11・・・・−・昇降機構、12・
・・・・・昇降プレート、13,25・・・・・・反転
部材、14,27・・・・・・反転機構、15,16,
29・・・・・・ストッパピン、17,18,30・・
・・・・シリンダ、19・・・・・・案内ロール、20
・・・・−■字状溝、22・・・・・・長孔、24・・
・・・・往復機構、26・−・・・・案内円筒、28a
,28b・・・・・・スリット。1 and 2 are a perspective view and a partially enlarged front view illustrating the work of transferring wafers to an alignment jig according to a conventional example, and FIG. 3 is an illustration of a disk-shaped member alignment device according to the present invention. A perspective view showing the embodiment; FIG. 4 is a partial front view of the main parts of the same;
FIG. 5 is a sectional view of the guide and reversing member same as above, and FIG. 6 is a perspective view showing essential parts of another embodiment same as above. 1...Diffusion boat, 2a, 2b...Small groove, l...Cassette, 4a, 4b...
Narrow groove, 5...way 1, 8. ...Moving mechanism, J...--Guiding member, 10a, 10b...
...V-shaped groove, 11...--lifting mechanism, 12.
... Lifting plate, 13, 25... Reversing member, 14, 27... Reversing mechanism, 15, 16,
29... Stopper pin, 17, 18, 30...
... Cylinder, 19 ... Guide roll, 20
...-■-shaped groove, 22...Elongated hole, 24...
... Reciprocating mechanism, 26 ... Guide cylinder, 28a
, 28b...Slit.
Claims (1)
組の整列治具と、これらの各整列治具を所定位置に位置
決めして、前記ピッチ毎にピッチ送りする移動機構と、
前記各整列治具の各細溝位置に臨ませて、一方の整列治
具側から下方に傾斜されて他方の整列治具側に向かうと
共に、板状部材の周縁部を案内する溝を形成させた案内
部材と、前記一方の整列治具内に表裏が一定方向に揃え
られて収容した板状部材を、前記案内部材の溝位置に対
応して移動させる移動機構と、案内部材の途上に配され
た反転部材を有して、転動降下してくる板状部材を、必
要に応じて表裏反転するように作動する反転機構と、前
記反転位置から他方の整列治具位置まで、転動降下する
板状部材を案内する案内ロールおよびその往復機構とを
備えたことを特徴とする板状部材の整列装置。1. A set of alignment jigs in which a large number of narrow grooves are formed, one set at each predetermined pitch, and a moving mechanism that positions each of these alignment jigs at a predetermined position and feeds the alignment jigs at each pitch,
A groove is formed facing each narrow groove position of each of the alignment jigs, sloping downward from one alignment jig side toward the other alignment jig side, and guiding the peripheral edge of the plate-shaped member. a moving mechanism for moving a plate-like member housed in one alignment jig with its front and back aligned in a certain direction in accordance with the groove position of the guide member; and a moving mechanism disposed on the way of the guide member. a reversing mechanism that operates to reverse the plate-shaped member that is rolling down and reverses it as required; 1. A device for aligning plate-shaped members, comprising a guide roll that guides the plate-shaped members and a reciprocating mechanism therefor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5894479A JPS5932368B2 (en) | 1979-05-11 | 1979-05-11 | Alignment device for plate-shaped members |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5894479A JPS5932368B2 (en) | 1979-05-11 | 1979-05-11 | Alignment device for plate-shaped members |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55151417A JPS55151417A (en) | 1980-11-26 |
JPS5932368B2 true JPS5932368B2 (en) | 1984-08-08 |
Family
ID=13098932
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5894479A Expired JPS5932368B2 (en) | 1979-05-11 | 1979-05-11 | Alignment device for plate-shaped members |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5932368B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58169889U (en) * | 1982-05-10 | 1983-11-12 | 曲田 政司 | Multi-tier clothes drying equipment |
-
1979
- 1979-05-11 JP JP5894479A patent/JPS5932368B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS55151417A (en) | 1980-11-26 |
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