JPS5768069A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5768069A
JPS5768069A JP14421080A JP14421080A JPS5768069A JP S5768069 A JPS5768069 A JP S5768069A JP 14421080 A JP14421080 A JP 14421080A JP 14421080 A JP14421080 A JP 14421080A JP S5768069 A JPS5768069 A JP S5768069A
Authority
JP
Japan
Prior art keywords
electrode
film
level
insulating film
mis structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14421080A
Other languages
Japanese (ja)
Inventor
Kunihiro Tanigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14421080A priority Critical patent/JPS5768069A/en
Publication of JPS5768069A publication Critical patent/JPS5768069A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/823406—Combination of charge coupled devices, i.e. CCD, or BBD

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

PURPOSE:To equalize the threshold values of an MIS structure by arranging metallic electrode of the first level through an insulating film on a naturally oxidized film of a compound semiconductor, covering it with an insulating film, and superposing partly the ends between the electrodes to arrange the electrode of the second level. CONSTITUTION:A naturally oxidized film 4 is formed by anodic oxidation or the like on a compound semiconductor substrate 3, and an SiO2 film 5 is laminated. The first level electrode 4a of aluminum is selectively formed, the surface is anodically oxidized, and is covered with Al2O3 film 10. Aluminum is deposited on the overall surface, is patterned as predetermined to form the electrode 4b of the second level, and is partly superposed with the electrode 4a. With this configuration, the insulating film of an MIS structure may have uniform thickness. Accordingly, the threshold voltage of the MIS structure can be equalized, thereby obtaining highly reliably CCD.
JP14421080A 1980-10-14 1980-10-14 Manufacture of semiconductor device Pending JPS5768069A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14421080A JPS5768069A (en) 1980-10-14 1980-10-14 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14421080A JPS5768069A (en) 1980-10-14 1980-10-14 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5768069A true JPS5768069A (en) 1982-04-26

Family

ID=15356785

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14421080A Pending JPS5768069A (en) 1980-10-14 1980-10-14 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5768069A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5002896A (en) * 1989-08-18 1991-03-26 Kabushiki Kaisha Toshiba Mask-ROM manufacturing method that enhances integration density

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5002896A (en) * 1989-08-18 1991-03-26 Kabushiki Kaisha Toshiba Mask-ROM manufacturing method that enhances integration density

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