JPS57193113A - Manufacture of piezoelectric resonator - Google Patents
Manufacture of piezoelectric resonatorInfo
- Publication number
- JPS57193113A JPS57193113A JP7982181A JP7982181A JPS57193113A JP S57193113 A JPS57193113 A JP S57193113A JP 7982181 A JP7982181 A JP 7982181A JP 7982181 A JP7982181 A JP 7982181A JP S57193113 A JPS57193113 A JP S57193113A
- Authority
- JP
- Japan
- Prior art keywords
- base
- mass
- thickness
- piezoelectric
- piezoelectric film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 230000010355 oscillation Effects 0.000 abstract 3
- 238000007740 vapor deposition Methods 0.000 abstract 2
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
- 229910052709 silver Inorganic materials 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7982181A JPS57193113A (en) | 1981-05-25 | 1981-05-25 | Manufacture of piezoelectric resonator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7982181A JPS57193113A (en) | 1981-05-25 | 1981-05-25 | Manufacture of piezoelectric resonator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57193113A true JPS57193113A (en) | 1982-11-27 |
Family
ID=13700864
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7982181A Pending JPS57193113A (en) | 1981-05-25 | 1981-05-25 | Manufacture of piezoelectric resonator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57193113A (ja) |
-
1981
- 1981-05-25 JP JP7982181A patent/JPS57193113A/ja active Pending
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