JPS57193113A - Manufacture of piezoelectric resonator - Google Patents
Manufacture of piezoelectric resonatorInfo
- Publication number
- JPS57193113A JPS57193113A JP7982181A JP7982181A JPS57193113A JP S57193113 A JPS57193113 A JP S57193113A JP 7982181 A JP7982181 A JP 7982181A JP 7982181 A JP7982181 A JP 7982181A JP S57193113 A JPS57193113 A JP S57193113A
- Authority
- JP
- Japan
- Prior art keywords
- base
- mass
- thickness
- piezoelectric
- piezoelectric film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 230000010355 oscillation Effects 0.000 abstract 3
- 238000007740 vapor deposition Methods 0.000 abstract 2
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
- 229910052709 silver Inorganic materials 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE:To mass-produce piezoelectric resonators with increased spurious characteristics with low cost, by forming a piezoelectric film on an oscillation base plane with unequel thickness and forming electrodes on the piezoelectric film. CONSTITUTION:The thickness of an oscillation base 1 made of a metallic elastic body is not uniform. A piezoelectric film 2 is formed on one side of the base 1 with the sputtering or vapor deposition, and an electrode 3 is formed on the film 2 with Au or Ag by the printing or vapor deposition. In this case, since an oscillation base made of a metallic plate or an insulation plate which is easy for processing and offers mass-productivity and is low in the cost, piezoelectric resonators with increased spurious characteristics can be mass-produced with low cost by changing the thickness over the entire base 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7982181A JPS57193113A (en) | 1981-05-25 | 1981-05-25 | Manufacture of piezoelectric resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7982181A JPS57193113A (en) | 1981-05-25 | 1981-05-25 | Manufacture of piezoelectric resonator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57193113A true JPS57193113A (en) | 1982-11-27 |
Family
ID=13700864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7982181A Pending JPS57193113A (en) | 1981-05-25 | 1981-05-25 | Manufacture of piezoelectric resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57193113A (en) |
-
1981
- 1981-05-25 JP JP7982181A patent/JPS57193113A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5538785A (en) | Voltage tuning fork | |
| GB1440336A (en) | Piezoelectric resonators | |
| JPS5291669A (en) | Piezoelectric vibrator | |
| JPS57193113A (en) | Manufacture of piezoelectric resonator | |
| JPS57118419A (en) | Flat pack type oscillating circuit parts | |
| JPS57202112A (en) | Piezoelectric oscillator | |
| JPS6420714A (en) | Surface acoustic wave device | |
| GB1285095A (en) | Piezo-electric thickness vibrator | |
| JPS56109017A (en) | Tuning fork type piezoelectric oscillator | |
| JPS55124282A (en) | Method of fabricating piezoelectric acoustic converter | |
| JPS56136016A (en) | Tuning fork type piezoelectric oscillator | |
| JPS56153527A (en) | Piezoelectric bimorph type transducer | |
| JPS5478690A (en) | Crystal vibrator | |
| JPS53123051A (en) | Filter for surface slip wave | |
| JPS55119345A (en) | Thin type battery | |
| JPS5698995A (en) | Ultrasonic-wave transmitter-receiver | |
| JPS5571311A (en) | Vibrator | |
| JPS56114422A (en) | Piezoelectric oscillator | |
| JPS57183116A (en) | Piezoelectric oscillator | |
| JPS57104833A (en) | Temperature sensor | |
| JPS5827552Y2 (en) | piezoelectric vibrator | |
| JPS533180A (en) | Piezoelectric vibrator unit | |
| GB1216603A (en) | A piezoelectric resonator | |
| JPS548438A (en) | Electronic parts using ceramic resonator | |
| JPS5210092A (en) | Manufacture of piezoelectric ceramic element |