JPS57178359A - Semiconductor integrated circuit device - Google Patents
Semiconductor integrated circuit deviceInfo
- Publication number
- JPS57178359A JPS57178359A JP56062501A JP6250181A JPS57178359A JP S57178359 A JPS57178359 A JP S57178359A JP 56062501 A JP56062501 A JP 56062501A JP 6250181 A JP6250181 A JP 6250181A JP S57178359 A JPS57178359 A JP S57178359A
- Authority
- JP
- Japan
- Prior art keywords
- type
- resistance value
- region
- potential
- load resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B10/00—Static random access memory [SRAM] devices
Landscapes
- Semiconductor Memories (AREA)
Abstract
PURPOSE:To enable to control the resistance value positively utilizing the existence of the inversion layer generated by field-effect by a method wherein the resistance value of a semiconductor layer, as the load resistor of memory cell, is controlled by applying the voltage of FET diffusion region through an insulating film. CONSTITUTION:A thin gate oxide film is formed directly below load resistors R1 and R2, and a P<+> type semiconductor regions 17 and 18, which will be coupled to drain regions 3 and 4, are formed below the gate oxide film using ion-implanting technique. In other words, an insulating gate type FET structure, wherein a P<+> type region 17 of the potential same as the drain region 4 of MOS2 is used on the side of the load resistor R1 and a a polysilicon layer R1 is used as a channel, is formed. Also, in the same manner as above, the P<+> type region 18 of the same potential as the drain region 3 of MOS1 is used as a gate on the side of the load resistor R2, and an insulating gate type FET structure having a polysilicon layer R2 as a channel is formed, thereby enabling to control the resistance value of the load resistors R1 and R2 by changing the potential of the P<+> type regions 17 and 18.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56062501A JPS57178359A (en) | 1981-04-27 | 1981-04-27 | Semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56062501A JPS57178359A (en) | 1981-04-27 | 1981-04-27 | Semiconductor integrated circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57178359A true JPS57178359A (en) | 1982-11-02 |
Family
ID=13201970
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56062501A Pending JPS57178359A (en) | 1981-04-27 | 1981-04-27 | Semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57178359A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0817208B2 (en) * | 1987-09-14 | 1996-02-21 | モトローラ・インコーポレーテツド | Trench cell for integrated circuit |
-
1981
- 1981-04-27 JP JP56062501A patent/JPS57178359A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0817208B2 (en) * | 1987-09-14 | 1996-02-21 | モトローラ・インコーポレーテツド | Trench cell for integrated circuit |
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