JPS57158940A - Electron microscope which can observe energy loss image - Google Patents
Electron microscope which can observe energy loss imageInfo
- Publication number
- JPS57158940A JPS57158940A JP4347981A JP4347981A JPS57158940A JP S57158940 A JPS57158940 A JP S57158940A JP 4347981 A JP4347981 A JP 4347981A JP 4347981 A JP4347981 A JP 4347981A JP S57158940 A JPS57158940 A JP S57158940A
- Authority
- JP
- Japan
- Prior art keywords
- energy loss
- electron
- sample
- deflected
- energy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Abstract
PURPOSE:To obtain an electronic microscope which can observe an energy loss scanning image without mounting an energy analyzer. CONSTITUTION:When an irradiated electron beam (EB) is deflected largely right as shown by a solid line EB1, is not deflected as shown by a dotted line EB2, and is deflected right as snown by a two-dot line EB3. The position of an electron which is incident on an intermediate lens 4 and its angle are deflected by deflection systems 6a and 6b so as to be always fixed. Thus the electron which is incident on a detector 7 is EB1 with special energy which passes through each point of a sample. Since the energy of the electron irradiated on a sample 2 is fixed, the separation of EB1, EB2, EB3..., by the intermediate lens 4 indicates a difference in the energy loss by the sample 2. Therefore, by detecting only the special electron EB1 and guiding it a cathode-ray tube, the energy loss image by the sample is displayed on the pertinent cathode-ray tube. When a different energy loss image is obtained, either separated electron beam EB2 or EB3 may be caught by the detector 7 by adjusting a deflection power supply.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4347981A JPS57158940A (en) | 1981-03-25 | 1981-03-25 | Electron microscope which can observe energy loss image |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4347981A JPS57158940A (en) | 1981-03-25 | 1981-03-25 | Electron microscope which can observe energy loss image |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57158940A true JPS57158940A (en) | 1982-09-30 |
Family
ID=12664852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4347981A Pending JPS57158940A (en) | 1981-03-25 | 1981-03-25 | Electron microscope which can observe energy loss image |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57158940A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60118342U (en) * | 1984-01-19 | 1985-08-10 | 川崎重工業株式会社 | Shaft sealing device of composite supercharger |
| US8794905B2 (en) | 2008-04-08 | 2014-08-05 | Ihi Corporation | Turbocharger |
| US9261106B2 (en) | 2009-12-15 | 2016-02-16 | Perkins Engines Company Limited | System for reducing compressor oil consumption |
-
1981
- 1981-03-25 JP JP4347981A patent/JPS57158940A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60118342U (en) * | 1984-01-19 | 1985-08-10 | 川崎重工業株式会社 | Shaft sealing device of composite supercharger |
| JPH0117622Y2 (en) * | 1984-01-19 | 1989-05-23 | ||
| US8794905B2 (en) | 2008-04-08 | 2014-08-05 | Ihi Corporation | Turbocharger |
| US9261106B2 (en) | 2009-12-15 | 2016-02-16 | Perkins Engines Company Limited | System for reducing compressor oil consumption |
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