JPS57145325A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS57145325A JPS57145325A JP56030867A JP3086781A JPS57145325A JP S57145325 A JPS57145325 A JP S57145325A JP 56030867 A JP56030867 A JP 56030867A JP 3086781 A JP3086781 A JP 3086781A JP S57145325 A JPS57145325 A JP S57145325A
- Authority
- JP
- Japan
- Prior art keywords
- coating
- abietic
- wax
- photoresist
- films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE:To prevent the production of pinholes on films and easily obtaine thick films, by double-superposing the films of different qualitites when applying photoresist or abietic wax, etc. on a semiconductor wafer. CONSTITUTION:First a semiconductor wafer 2 is treated with dip-coating of photoresist or abietic wax, etc. and then slightly rotated in the thickness direction of the wafer 2. Next, after softly drying the photoresist and abietic wax, etc., fine-grained spray coating 3 is done. This method eliminates most of pinholes on a film surface by the first dip coating to provide easy and stably coating for the edge of grooves.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56030867A JPS57145325A (en) | 1981-03-04 | 1981-03-04 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56030867A JPS57145325A (en) | 1981-03-04 | 1981-03-04 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57145325A true JPS57145325A (en) | 1982-09-08 |
Family
ID=12315671
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56030867A Pending JPS57145325A (en) | 1981-03-04 | 1981-03-04 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57145325A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2671543C1 (en) * | 2017-06-26 | 2018-11-01 | Российская Федерация, от имени которой выступает Министерство обороны Российской Федерации | Method of creating a bilateral topological pattern in metallization on substrates with through metallized micro-holes |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS495271A (en) * | 1972-05-01 | 1974-01-17 | ||
JPS52116174A (en) * | 1976-03-26 | 1977-09-29 | Nec Corp | Manufacture of semiconductor device |
JPS5562738A (en) * | 1978-11-02 | 1980-05-12 | Nec Corp | Preparation of semiconductor element |
-
1981
- 1981-03-04 JP JP56030867A patent/JPS57145325A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS495271A (en) * | 1972-05-01 | 1974-01-17 | ||
JPS52116174A (en) * | 1976-03-26 | 1977-09-29 | Nec Corp | Manufacture of semiconductor device |
JPS5562738A (en) * | 1978-11-02 | 1980-05-12 | Nec Corp | Preparation of semiconductor element |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2671543C1 (en) * | 2017-06-26 | 2018-11-01 | Российская Федерация, от имени которой выступает Министерство обороны Российской Федерации | Method of creating a bilateral topological pattern in metallization on substrates with through metallized micro-holes |
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