JPS5226214A - Method for coating resist - Google Patents
Method for coating resistInfo
- Publication number
- JPS5226214A JPS5226214A JP50102195A JP10219575A JPS5226214A JP S5226214 A JPS5226214 A JP S5226214A JP 50102195 A JP50102195 A JP 50102195A JP 10219575 A JP10219575 A JP 10219575A JP S5226214 A JPS5226214 A JP S5226214A
- Authority
- JP
- Japan
- Prior art keywords
- resist
- coating resist
- wafer
- coating
- resist film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE:To prevent a resist from thickening on a peripheral surface of a resist film on coating the resist on wafer by means of forming the resist film in such a manner that the rotation speed of the wafer to be coated after reaching the maximum value is kept for a slight time and reduced to that of one step below.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50102195A JPS5226214A (en) | 1975-08-25 | 1975-08-25 | Method for coating resist |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50102195A JPS5226214A (en) | 1975-08-25 | 1975-08-25 | Method for coating resist |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5226214A true JPS5226214A (en) | 1977-02-26 |
JPS5530212B2 JPS5530212B2 (en) | 1980-08-09 |
Family
ID=14320871
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50102195A Granted JPS5226214A (en) | 1975-08-25 | 1975-08-25 | Method for coating resist |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5226214A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5916333A (en) * | 1982-07-19 | 1984-01-27 | Matsushita Electronics Corp | Resist coating method |
JPS6197923A (en) * | 1984-10-19 | 1986-05-16 | Matsushita Electric Ind Co Ltd | Method and apparatus for manufacturing semiconductor device |
US4748053A (en) * | 1983-12-08 | 1988-05-31 | Hoya Corporation | Method of forming a uniform resist film by selecting a duration of rotation |
JPS63177329A (en) * | 1980-08-11 | 1988-07-21 | デイスコビジョン アソシエイツ | Molding of video disc |
JP2015223556A (en) * | 2014-05-28 | 2015-12-14 | 株式会社ディスコ | Coating method of protective film |
KR20160140462A (en) * | 2015-05-27 | 2016-12-07 | 수스 마이크로텍 리소그라피 게엠바하 | Device for treating a disc-shaped substrate and support adapter |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS493029A (en) * | 1972-04-27 | 1974-01-11 |
-
1975
- 1975-08-25 JP JP50102195A patent/JPS5226214A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS493029A (en) * | 1972-04-27 | 1974-01-11 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63177329A (en) * | 1980-08-11 | 1988-07-21 | デイスコビジョン アソシエイツ | Molding of video disc |
JPH0346895B2 (en) * | 1980-08-11 | 1991-07-17 | Discovision Ass | |
JPS5916333A (en) * | 1982-07-19 | 1984-01-27 | Matsushita Electronics Corp | Resist coating method |
JPH0345529B2 (en) * | 1982-07-19 | 1991-07-11 | Matsushita Electronics Corp | |
US4748053A (en) * | 1983-12-08 | 1988-05-31 | Hoya Corporation | Method of forming a uniform resist film by selecting a duration of rotation |
JPS6197923A (en) * | 1984-10-19 | 1986-05-16 | Matsushita Electric Ind Co Ltd | Method and apparatus for manufacturing semiconductor device |
JPH056341B2 (en) * | 1984-10-19 | 1993-01-26 | Matsushita Electric Ind Co Ltd | |
JP2015223556A (en) * | 2014-05-28 | 2015-12-14 | 株式会社ディスコ | Coating method of protective film |
KR20160140462A (en) * | 2015-05-27 | 2016-12-07 | 수스 마이크로텍 리소그라피 게엠바하 | Device for treating a disc-shaped substrate and support adapter |
Also Published As
Publication number | Publication date |
---|---|
JPS5530212B2 (en) | 1980-08-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 6 Free format text: PAYMENT UNTIL: 20090509 |
|
LAPS | Cancellation because of no payment of annual fees |