JPS5712424A - Production of magnetic recorder - Google Patents

Production of magnetic recorder

Info

Publication number
JPS5712424A
JPS5712424A JP8591380A JP8591380A JPS5712424A JP S5712424 A JPS5712424 A JP S5712424A JP 8591380 A JP8591380 A JP 8591380A JP 8591380 A JP8591380 A JP 8591380A JP S5712424 A JPS5712424 A JP S5712424A
Authority
JP
Japan
Prior art keywords
torr
tank
discharge
gas
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8591380A
Other languages
Japanese (ja)
Inventor
Masanori Sakamoto
Masataka Miyamura
Yuko Fujiwara
Masayuki Sunai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP8591380A priority Critical patent/JPS5712424A/en
Publication of JPS5712424A publication Critical patent/JPS5712424A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/851—Coating a support with a magnetic layer by sputtering

Landscapes

  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To obtain a vertical magnetic recorder containing an alloy thin film which is excellent in the crystalline anisotropy, by cleaning the surface of a support substrate with impact of the inactive gas cation caused by the glow discharge and then having a vacuum evaporation of a Co-Cr group alloy thin film on the support substrate. CONSTITUTION:The high-purity argon gas is put into a vacuum tank 1 in which the pressure is reduced previously down to about 5X10<-7>Torr, and then the internal pressure of the tank 1 is changed to about 10<-3>-10<-4>Torr. Then the high- frequency electric power is applied to an RF electrode 3 from a power source 4 to start the glow discharge. The supply of gas is discontinued in about 1-10min after the start of discharge, and the gas in the tank 1 is evacuated down to <= about 10<-5>Torr while intermitting the discharge. (Meanwhile a support substrate 7 receives an impact of cation.) Then the source 4 is switched off when the discharge ceases or the pressure of the tank 1 is set at about 5X10<-6>Torr, and a shutter 5 is opened. Both Co and Cr are evaporated from a evaporation source 6 that is heated previously to form a Co-Cr group alloy thin film on the substrate 7.
JP8591380A 1980-06-26 1980-06-26 Production of magnetic recorder Pending JPS5712424A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8591380A JPS5712424A (en) 1980-06-26 1980-06-26 Production of magnetic recorder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8591380A JPS5712424A (en) 1980-06-26 1980-06-26 Production of magnetic recorder

Publications (1)

Publication Number Publication Date
JPS5712424A true JPS5712424A (en) 1982-01-22

Family

ID=13872041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8591380A Pending JPS5712424A (en) 1980-06-26 1980-06-26 Production of magnetic recorder

Country Status (1)

Country Link
JP (1) JPS5712424A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0489627A (en) * 1990-07-25 1992-03-23 Matsushita Electric Ind Co Ltd Production of magnetic recording medium

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0489627A (en) * 1990-07-25 1992-03-23 Matsushita Electric Ind Co Ltd Production of magnetic recording medium

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