JPS5712424A - Production of magnetic recorder - Google Patents
Production of magnetic recorderInfo
- Publication number
- JPS5712424A JPS5712424A JP8591380A JP8591380A JPS5712424A JP S5712424 A JPS5712424 A JP S5712424A JP 8591380 A JP8591380 A JP 8591380A JP 8591380 A JP8591380 A JP 8591380A JP S5712424 A JPS5712424 A JP S5712424A
- Authority
- JP
- Japan
- Prior art keywords
- torr
- tank
- discharge
- gas
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/851—Coating a support with a magnetic layer by sputtering
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Abstract
PURPOSE:To obtain a vertical magnetic recorder containing an alloy thin film which is excellent in the crystalline anisotropy, by cleaning the surface of a support substrate with impact of the inactive gas cation caused by the glow discharge and then having a vacuum evaporation of a Co-Cr group alloy thin film on the support substrate. CONSTITUTION:The high-purity argon gas is put into a vacuum tank 1 in which the pressure is reduced previously down to about 5X10<-7>Torr, and then the internal pressure of the tank 1 is changed to about 10<-3>-10<-4>Torr. Then the high- frequency electric power is applied to an RF electrode 3 from a power source 4 to start the glow discharge. The supply of gas is discontinued in about 1-10min after the start of discharge, and the gas in the tank 1 is evacuated down to <= about 10<-5>Torr while intermitting the discharge. (Meanwhile a support substrate 7 receives an impact of cation.) Then the source 4 is switched off when the discharge ceases or the pressure of the tank 1 is set at about 5X10<-6>Torr, and a shutter 5 is opened. Both Co and Cr are evaporated from a evaporation source 6 that is heated previously to form a Co-Cr group alloy thin film on the substrate 7.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8591380A JPS5712424A (en) | 1980-06-26 | 1980-06-26 | Production of magnetic recorder |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8591380A JPS5712424A (en) | 1980-06-26 | 1980-06-26 | Production of magnetic recorder |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5712424A true JPS5712424A (en) | 1982-01-22 |
Family
ID=13872041
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8591380A Pending JPS5712424A (en) | 1980-06-26 | 1980-06-26 | Production of magnetic recorder |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5712424A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0489627A (en) * | 1990-07-25 | 1992-03-23 | Matsushita Electric Ind Co Ltd | Production of magnetic recording medium |
-
1980
- 1980-06-26 JP JP8591380A patent/JPS5712424A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0489627A (en) * | 1990-07-25 | 1992-03-23 | Matsushita Electric Ind Co Ltd | Production of magnetic recording medium |
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