JPS5516409A - Process for production of cr film - Google Patents

Process for production of cr film

Info

Publication number
JPS5516409A
JPS5516409A JP8840878A JP8840878A JPS5516409A JP S5516409 A JPS5516409 A JP S5516409A JP 8840878 A JP8840878 A JP 8840878A JP 8840878 A JP8840878 A JP 8840878A JP S5516409 A JPS5516409 A JP S5516409A
Authority
JP
Japan
Prior art keywords
film
vapor
stainless steel
less
depositing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8840878A
Other languages
Japanese (ja)
Inventor
Masahide Suenaga
Noboru Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8840878A priority Critical patent/JPS5516409A/en
Publication of JPS5516409A publication Critical patent/JPS5516409A/en
Pending legal-status Critical Current

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  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE: To produce a Cr film, which peels only with difficulty and has less defects, by employing a sample bed or substrate holder made of stainless steel in vapor-deposing the Cr film by the sputtering method.
CONSTITUTION: In vapor-depositing a Cr film with a film thickness of 0.5μm or more on a ferrite substrate 1 by use of a RF sputtering apparatus, a Cr targent plate 4 is provided on an upper electrode 2 and the ferrite substrate 1 is provided through a sample bad 5 or substrate holder made of stainless steel on a lower electrode, and the vapor-depositing is carried out at an argon pressure of 5×10-3 Torr and a power density of 1 W/cm2. Since the stainless steel has a thermal expansion coefficient close to that of Cr and its surface is less deteriorated, there occurs no attachment of Cr film fragments 6 onto the surface of the formed Cr film 7 from the surface of the sample bed as indicated by an arrow 9, and thus the Cr film having less surface defects can be produced.
COPYRIGHT: (C)1980,JPO&Japio
JP8840878A 1978-07-21 1978-07-21 Process for production of cr film Pending JPS5516409A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8840878A JPS5516409A (en) 1978-07-21 1978-07-21 Process for production of cr film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8840878A JPS5516409A (en) 1978-07-21 1978-07-21 Process for production of cr film

Publications (1)

Publication Number Publication Date
JPS5516409A true JPS5516409A (en) 1980-02-05

Family

ID=13941963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8840878A Pending JPS5516409A (en) 1978-07-21 1978-07-21 Process for production of cr film

Country Status (1)

Country Link
JP (1) JPS5516409A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6316583B1 (en) 1998-09-22 2001-11-13 Borden Chemical, Inc. Phenol-novolacs with improved optical properties

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6316583B1 (en) 1998-09-22 2001-11-13 Borden Chemical, Inc. Phenol-novolacs with improved optical properties

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