JPS5518159A - Frequency control method for surface wave device - Google Patents

Frequency control method for surface wave device

Info

Publication number
JPS5518159A
JPS5518159A JP9122178A JP9122178A JPS5518159A JP S5518159 A JPS5518159 A JP S5518159A JP 9122178 A JP9122178 A JP 9122178A JP 9122178 A JP9122178 A JP 9122178A JP S5518159 A JPS5518159 A JP S5518159A
Authority
JP
Japan
Prior art keywords
comb
sputtering
surface wave
wave device
control method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9122178A
Other languages
Japanese (ja)
Inventor
Kazuo Tatsuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9122178A priority Critical patent/JPS5518159A/en
Publication of JPS5518159A publication Critical patent/JPS5518159A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H03H3/10—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves for obtaining desired frequency or temperature coefficient

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To control the central frequency of the pass band by evaporating through sputtering the insulating film on the opposing electrodes of the comb-line electrodes provided on the substrate at the final stage of the manufacturing process. CONSTITUTION:Comb-line electrodes 2 and 2' are provided on substrate 1; piezoelectric substance 3 of 2.5mu thick is evaporated by sputtering on the comb-line electrodes; and furthermore opposing electrodes 4 and 4' are provided on substance 3. Thus a surface wave device is formed. In case the device thus manufactured in out of the standard, the insulator is evaporated by sputtering about 1000Angstrom on the device. As a result, the sound speed can be changed within the device, and the central frequency of the device is controlled to obtain the standardized products.
JP9122178A 1978-07-26 1978-07-26 Frequency control method for surface wave device Pending JPS5518159A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9122178A JPS5518159A (en) 1978-07-26 1978-07-26 Frequency control method for surface wave device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9122178A JPS5518159A (en) 1978-07-26 1978-07-26 Frequency control method for surface wave device

Publications (1)

Publication Number Publication Date
JPS5518159A true JPS5518159A (en) 1980-02-08

Family

ID=14020361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9122178A Pending JPS5518159A (en) 1978-07-26 1978-07-26 Frequency control method for surface wave device

Country Status (1)

Country Link
JP (1) JPS5518159A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0141487A2 (en) * 1983-10-21 1985-05-15 Matsushita Electric Industrial Co., Ltd. Method of manufacturing surface acoustic wave device
JPS62232209A (en) * 1986-04-01 1987-10-12 Murata Mfg Co Ltd Frequency adjusting method for surface acoustic wave device
JPS62232208A (en) * 1986-04-01 1987-10-12 Murata Mfg Co Ltd Frequency adjusting method for surface acoustic wave device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS524830U (en) * 1975-06-24 1977-01-13
JPS5230361A (en) * 1975-09-04 1977-03-08 Murata Mfg Co Ltd Frequency adjustment method for elastic surface wave transducer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS524830U (en) * 1975-06-24 1977-01-13
JPS5230361A (en) * 1975-09-04 1977-03-08 Murata Mfg Co Ltd Frequency adjustment method for elastic surface wave transducer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0141487A2 (en) * 1983-10-21 1985-05-15 Matsushita Electric Industrial Co., Ltd. Method of manufacturing surface acoustic wave device
JPS62232209A (en) * 1986-04-01 1987-10-12 Murata Mfg Co Ltd Frequency adjusting method for surface acoustic wave device
JPS62232208A (en) * 1986-04-01 1987-10-12 Murata Mfg Co Ltd Frequency adjusting method for surface acoustic wave device

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