JPS5693339A - Function test device of integrated circuit - Google Patents

Function test device of integrated circuit

Info

Publication number
JPS5693339A
JPS5693339A JP16915979A JP16915979A JPS5693339A JP S5693339 A JPS5693339 A JP S5693339A JP 16915979 A JP16915979 A JP 16915979A JP 16915979 A JP16915979 A JP 16915979A JP S5693339 A JPS5693339 A JP S5693339A
Authority
JP
Japan
Prior art keywords
test
standard
integrated circuit
constitution
compared
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16915979A
Other languages
Japanese (ja)
Inventor
Yoshiaki Goto
Yasuo Furukawa
Toshihiro Ishizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16915979A priority Critical patent/JPS5693339A/en
Publication of JPS5693339A publication Critical patent/JPS5693339A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To perform the logical test of an integrated circuit by a method wherein IC's for standard and for test are irradiated respectively with separate scanning electron microscopes, and the generated signals are compared and collated. CONSTITUTION:The IC's for standard 12 and for test 14 are so positioned as the same circuit parts can be irradiated with electron beam 3a, 3b at the same time. The secondary electrons are discharged by the irradiation in accordance with respective electric potentials of the same circuit parts, and are detected 10a, 10b to convert into electric signals proportional to their quantity. They are differentially amplified 20 to obtain the absolute value 22 of the output voltage VD, and is compared 24 with the standard voltage. The VD is nearly zero in the normal condition. By this constitution, because the test is performed by comparing respective part potentials of the both IC's, so that the accurate operation test can be performed without receiving the effect of the circumferential potential distribution of measuring point, etc.
JP16915979A 1979-12-27 1979-12-27 Function test device of integrated circuit Pending JPS5693339A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16915979A JPS5693339A (en) 1979-12-27 1979-12-27 Function test device of integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16915979A JPS5693339A (en) 1979-12-27 1979-12-27 Function test device of integrated circuit

Publications (1)

Publication Number Publication Date
JPS5693339A true JPS5693339A (en) 1981-07-28

Family

ID=15881364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16915979A Pending JPS5693339A (en) 1979-12-27 1979-12-27 Function test device of integrated circuit

Country Status (1)

Country Link
JP (1) JPS5693339A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5870542A (en) * 1981-10-23 1983-04-27 Fujitsu Ltd Failure analyzing device for integrated circuit
JPS58166734A (en) * 1982-03-29 1983-10-01 Fujitsu Ltd Analyzer for defectiveness in integrated circuit
JPS59114821A (en) * 1982-12-22 1984-07-03 Fujitsu Ltd Inspection of ic pattern
JPS6217132U (en) * 1986-06-20 1987-02-02

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5870542A (en) * 1981-10-23 1983-04-27 Fujitsu Ltd Failure analyzing device for integrated circuit
JPS58166734A (en) * 1982-03-29 1983-10-01 Fujitsu Ltd Analyzer for defectiveness in integrated circuit
JPS6341218B2 (en) * 1982-03-29 1988-08-16 Fujitsu Ltd
JPS59114821A (en) * 1982-12-22 1984-07-03 Fujitsu Ltd Inspection of ic pattern
JPS6217132U (en) * 1986-06-20 1987-02-02

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