JPS568838A - Testing method of integrated circuit device - Google Patents

Testing method of integrated circuit device

Info

Publication number
JPS568838A
JPS568838A JP8410279A JP8410279A JPS568838A JP S568838 A JPS568838 A JP S568838A JP 8410279 A JP8410279 A JP 8410279A JP 8410279 A JP8410279 A JP 8410279A JP S568838 A JPS568838 A JP S568838A
Authority
JP
Japan
Prior art keywords
potential
logic potential
electron beam
testing method
computer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8410279A
Other languages
Japanese (ja)
Other versions
JPS5853504B2 (en
Inventor
Yoshiaki Goto
Yasuo Furukawa
Yushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP54084102A priority Critical patent/JPS5853504B2/en
Publication of JPS568838A publication Critical patent/JPS568838A/en
Publication of JPS5853504B2 publication Critical patent/JPS5853504B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To obtain an accurate testing method for the performance test of IC element by a method wherein an electron beam is applied to the element applying a logic potential and the obtained potential distribution information is stored, the same process is repeated changing the applied logic potential and the obtained information are compared. CONSTITUTION:An IC element 60 put on a sample stand 5 in a vacuum vessel B is arranged, and the surface of element 60 is scanned by an electron beam EB applying an appointed source potential and logic potential to the element from a power source 200. Secondary electrons discharged from the element are detected by a detector S, sent to an amplifier 20 and converted to a digital data series in an AD converter 30 to store in the first memory region 310 in a computer 300. Then only the logic potential to be given to the element 60 is changed using a function generator 100, and the obtained data series in the same way is stored in the second memory region 320 in the computer 300. The difference of surface potential image formed by those data is operated in an arithmetic circuit 330 to indicate as the performance condition on a picture output device 400.
JP54084102A 1979-07-03 1979-07-03 Test methods for integrated circuit devices Expired JPS5853504B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54084102A JPS5853504B2 (en) 1979-07-03 1979-07-03 Test methods for integrated circuit devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54084102A JPS5853504B2 (en) 1979-07-03 1979-07-03 Test methods for integrated circuit devices

Publications (2)

Publication Number Publication Date
JPS568838A true JPS568838A (en) 1981-01-29
JPS5853504B2 JPS5853504B2 (en) 1983-11-29

Family

ID=13821151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54084102A Expired JPS5853504B2 (en) 1979-07-03 1979-07-03 Test methods for integrated circuit devices

Country Status (1)

Country Link
JP (1) JPS5853504B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58155636A (en) * 1982-03-12 1983-09-16 Hitachi Ltd Holography electron microscope
JPS59158062A (en) * 1983-02-28 1984-09-07 Jeol Ltd Scanning electron microscope
JPS60145918U (en) * 1984-03-09 1985-09-27 株式会社日立製作所 Automotive air conditioner
JPS60254545A (en) * 1984-05-31 1985-12-16 Rigaku Denki Kogyo Kk Scanning analyzer
JPS6151658U (en) * 1984-09-06 1986-04-07
JPS6174249A (en) * 1984-09-19 1986-04-16 Hitachi Ltd Device for focusing electron microscope

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0452084Y2 (en) * 1985-09-21 1992-12-08

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5120255A (en) * 1974-08-13 1976-02-18 Nippon Zeon Co Kakyokanona epiharohidorinjugotaisoseibutsu

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5120255A (en) * 1974-08-13 1976-02-18 Nippon Zeon Co Kakyokanona epiharohidorinjugotaisoseibutsu

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58155636A (en) * 1982-03-12 1983-09-16 Hitachi Ltd Holography electron microscope
JPH0377619B2 (en) * 1982-03-12 1991-12-11 Hitachi Ltd
JPS59158062A (en) * 1983-02-28 1984-09-07 Jeol Ltd Scanning electron microscope
JPH0339377B2 (en) * 1983-02-28 1991-06-13 Nippon Electron Optics Lab
JPS60145918U (en) * 1984-03-09 1985-09-27 株式会社日立製作所 Automotive air conditioner
JPS60254545A (en) * 1984-05-31 1985-12-16 Rigaku Denki Kogyo Kk Scanning analyzer
JPS6151658U (en) * 1984-09-06 1986-04-07
JPS6174249A (en) * 1984-09-19 1986-04-16 Hitachi Ltd Device for focusing electron microscope

Also Published As

Publication number Publication date
JPS5853504B2 (en) 1983-11-29

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