JPS5636058A - Measuring system for surface electric potential - Google Patents

Measuring system for surface electric potential

Info

Publication number
JPS5636058A
JPS5636058A JP11126779A JP11126779A JPS5636058A JP S5636058 A JPS5636058 A JP S5636058A JP 11126779 A JP11126779 A JP 11126779A JP 11126779 A JP11126779 A JP 11126779A JP S5636058 A JPS5636058 A JP S5636058A
Authority
JP
Japan
Prior art keywords
sample
electric potential
level
measured
electric field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11126779A
Other languages
Japanese (ja)
Inventor
Shigeru Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP11126779A priority Critical patent/JPS5636058A/en
Publication of JPS5636058A publication Critical patent/JPS5636058A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To permit a scanning type electron microscope to accurately measure the electric potential distribution on the surface of a sample electrified by setting a reference measuring position at a position on the sample holder where the electric field of the sample being measured has no effect.
CONSTITUTION: A reference position 20 is set at a position on a sample holder 7 where the electric field of the sample 30 being measured has no effect and no elec- tron beam comes. Externally providing the reference position 20 with a comparison and correction electric potential permits the level of the sample 30 electrified at 0V and the reference level to be on the same horizontal level. Levels aWc of the surface electric potential are measured from the difference between the reference level of said position 20 and the level obtained by detecting the secondary electron from the surface of the sample 30. The permits the reference level to be independent of the electric field of the sample 30, so that the surface electric potential of the sample 30 is accurately measured.
COPYRIGHT: (C)1981,JPO&Japio
JP11126779A 1979-08-31 1979-08-31 Measuring system for surface electric potential Pending JPS5636058A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11126779A JPS5636058A (en) 1979-08-31 1979-08-31 Measuring system for surface electric potential

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11126779A JPS5636058A (en) 1979-08-31 1979-08-31 Measuring system for surface electric potential

Publications (1)

Publication Number Publication Date
JPS5636058A true JPS5636058A (en) 1981-04-09

Family

ID=14556864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11126779A Pending JPS5636058A (en) 1979-08-31 1979-08-31 Measuring system for surface electric potential

Country Status (1)

Country Link
JP (1) JPS5636058A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008275608A (en) * 2008-04-07 2008-11-13 Ricoh Co Ltd Device and method for measuring electrostatic latent image
JP2009092663A (en) * 2008-10-20 2009-04-30 Ricoh Co Ltd Surface charge distribution measuring method and device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008275608A (en) * 2008-04-07 2008-11-13 Ricoh Co Ltd Device and method for measuring electrostatic latent image
JP2009092663A (en) * 2008-10-20 2009-04-30 Ricoh Co Ltd Surface charge distribution measuring method and device

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