JPS5636058A - Measuring system for surface electric potential - Google Patents
Measuring system for surface electric potentialInfo
- Publication number
- JPS5636058A JPS5636058A JP11126779A JP11126779A JPS5636058A JP S5636058 A JPS5636058 A JP S5636058A JP 11126779 A JP11126779 A JP 11126779A JP 11126779 A JP11126779 A JP 11126779A JP S5636058 A JPS5636058 A JP S5636058A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electric potential
- level
- measured
- electric field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To permit a scanning type electron microscope to accurately measure the electric potential distribution on the surface of a sample electrified by setting a reference measuring position at a position on the sample holder where the electric field of the sample being measured has no effect.
CONSTITUTION: A reference position 20 is set at a position on a sample holder 7 where the electric field of the sample 30 being measured has no effect and no elec- tron beam comes. Externally providing the reference position 20 with a comparison and correction electric potential permits the level of the sample 30 electrified at 0V and the reference level to be on the same horizontal level. Levels aWc of the surface electric potential are measured from the difference between the reference level of said position 20 and the level obtained by detecting the secondary electron from the surface of the sample 30. The permits the reference level to be independent of the electric field of the sample 30, so that the surface electric potential of the sample 30 is accurately measured.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11126779A JPS5636058A (en) | 1979-08-31 | 1979-08-31 | Measuring system for surface electric potential |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11126779A JPS5636058A (en) | 1979-08-31 | 1979-08-31 | Measuring system for surface electric potential |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5636058A true JPS5636058A (en) | 1981-04-09 |
Family
ID=14556864
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11126779A Pending JPS5636058A (en) | 1979-08-31 | 1979-08-31 | Measuring system for surface electric potential |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5636058A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008275608A (en) * | 2008-04-07 | 2008-11-13 | Ricoh Co Ltd | Device and method for measuring electrostatic latent image |
JP2009092663A (en) * | 2008-10-20 | 2009-04-30 | Ricoh Co Ltd | Surface charge distribution measuring method and device |
-
1979
- 1979-08-31 JP JP11126779A patent/JPS5636058A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008275608A (en) * | 2008-04-07 | 2008-11-13 | Ricoh Co Ltd | Device and method for measuring electrostatic latent image |
JP2009092663A (en) * | 2008-10-20 | 2009-04-30 | Ricoh Co Ltd | Surface charge distribution measuring method and device |
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