JPS5681413A - Inspection system for pattern - Google Patents
Inspection system for patternInfo
- Publication number
- JPS5681413A JPS5681413A JP15864379A JP15864379A JPS5681413A JP S5681413 A JPS5681413 A JP S5681413A JP 15864379 A JP15864379 A JP 15864379A JP 15864379 A JP15864379 A JP 15864379A JP S5681413 A JPS5681413 A JP S5681413A
- Authority
- JP
- Japan
- Prior art keywords
- set value
- pattern
- circuit
- signal
- line width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To make defect-correcting operation efficiency by providing a circuit generating an intermediate set value between the maximum and minimum set values of the line width of the pattern and further by providing a comparison circuit distinguishing a surplus from an insufficiency and defect based on the compared relative sizes between the intermediate set value and the line width, as well as a circuit detecting black points and pin holes of the pattern.
CONSTITUTION: From the intermediate-value generating circuit 21, the signal of the intermediate set value N between the maximum line width set value Ma and the minimum line width set value Mi is inputted to the intermediate set value comparison circuit 20. In the comparison circuit 20, a signal from a length-measuring circuit 9 is compared, and, with regard to a line-width signal between N and Mi in a lead part, the presence of a projected part is shown, while in a land part the presence of a large defect is shown. An intermediate signal between Ma and N shows the presence of a large projection in the lead part and that of a faulty part in the land part. Meanwhile, receiving the pattern data of a memory 8, the detecting part 22 for black points and pin holes detects the black points and pin holes in a prescribed area (100μ) inside and outside of the pattern. Accordingly, the correcting operation can be performed efficiently.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15864379A JPS5681413A (en) | 1979-12-06 | 1979-12-06 | Inspection system for pattern |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15864379A JPS5681413A (en) | 1979-12-06 | 1979-12-06 | Inspection system for pattern |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5681413A true JPS5681413A (en) | 1981-07-03 |
Family
ID=15676184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15864379A Pending JPS5681413A (en) | 1979-12-06 | 1979-12-06 | Inspection system for pattern |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5681413A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3331579A1 (en) | 1983-09-01 | 1985-03-21 | Klöckner-Humboldt-Deutz AG, 5000 Köln | Piston internal combustion engine |
| JPS60250629A (en) * | 1984-05-25 | 1985-12-11 | Fujitsu Ltd | Inspecting method of mask |
-
1979
- 1979-12-06 JP JP15864379A patent/JPS5681413A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3331579A1 (en) | 1983-09-01 | 1985-03-21 | Klöckner-Humboldt-Deutz AG, 5000 Köln | Piston internal combustion engine |
| JPS60250629A (en) * | 1984-05-25 | 1985-12-11 | Fujitsu Ltd | Inspecting method of mask |
| JPH048780B2 (en) * | 1984-05-25 | 1992-02-18 |
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