JPS5669760A - Scanning electronic microscope - Google Patents
Scanning electronic microscopeInfo
- Publication number
- JPS5669760A JPS5669760A JP14472279A JP14472279A JPS5669760A JP S5669760 A JPS5669760 A JP S5669760A JP 14472279 A JP14472279 A JP 14472279A JP 14472279 A JP14472279 A JP 14472279A JP S5669760 A JPS5669760 A JP S5669760A
- Authority
- JP
- Japan
- Prior art keywords
- nonpoint
- correcting device
- aberration correcting
- scanning signal
- terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004075 alteration Effects 0.000 abstract 4
- 238000010408 sweeping Methods 0.000 abstract 2
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 230000001360 synchronised effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Abstract
PURPOSE:To perform the adjustment of nonpoint aberration correcting device accurately and easily, by providing a signal synchronized with the specimen scanning signal of an electron beam to each four pole lens coil group used in XY type nonpoint aberration correcting device. CONSTITUTION:The coil group 27, 28 in a mirror tube 12 are four pole electromagnetic lens constituting the XY nonpoint correcting device and connected to nonpoint aberration correcting power sources 29, 30.The input terminal of the power sources 29, 30 is connected through a terminal b of exchange switches 31, 32 to a nonpoint control means 33. When turning the exchange switches 31, 32 to the side of terminal a, horizontal sweeping signal and vertical sweeping signal are provided respectively from a horizontal scanning signal generating circuit 21 and vertical scanning signal generating circuit 22 to four pole electromagnetic lenses 27, 28 in the nonpoint aberration correcting device, thereby images having different degree of nonpoint correction are indicated at each point in the picture face of Braun tube 25.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14472279A JPS5669760A (en) | 1979-11-08 | 1979-11-08 | Scanning electronic microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14472279A JPS5669760A (en) | 1979-11-08 | 1979-11-08 | Scanning electronic microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5669760A true JPS5669760A (en) | 1981-06-11 |
Family
ID=15368784
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14472279A Pending JPS5669760A (en) | 1979-11-08 | 1979-11-08 | Scanning electronic microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5669760A (en) |
-
1979
- 1979-11-08 JP JP14472279A patent/JPS5669760A/en active Pending
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