JPS5669760A - Scanning electronic microscope - Google Patents

Scanning electronic microscope

Info

Publication number
JPS5669760A
JPS5669760A JP14472279A JP14472279A JPS5669760A JP S5669760 A JPS5669760 A JP S5669760A JP 14472279 A JP14472279 A JP 14472279A JP 14472279 A JP14472279 A JP 14472279A JP S5669760 A JPS5669760 A JP S5669760A
Authority
JP
Japan
Prior art keywords
nonpoint
correcting device
aberration correcting
scanning signal
terminal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14472279A
Other languages
Japanese (ja)
Inventor
Setsuo Norioka
Kiyoshi Harasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP14472279A priority Critical patent/JPS5669760A/en
Publication of JPS5669760A publication Critical patent/JPS5669760A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To perform the adjustment of nonpoint aberration correcting device accurately and easily, by providing a signal synchronized with the specimen scanning signal of an electron beam to each four pole lens coil group used in XY type nonpoint aberration correcting device. CONSTITUTION:The coil group 27, 28 in a mirror tube 12 are four pole electromagnetic lens constituting the XY nonpoint correcting device and connected to nonpoint aberration correcting power sources 29, 30.The input terminal of the power sources 29, 30 is connected through a terminal b of exchange switches 31, 32 to a nonpoint control means 33. When turning the exchange switches 31, 32 to the side of terminal a, horizontal sweeping signal and vertical sweeping signal are provided respectively from a horizontal scanning signal generating circuit 21 and vertical scanning signal generating circuit 22 to four pole electromagnetic lenses 27, 28 in the nonpoint aberration correcting device, thereby images having different degree of nonpoint correction are indicated at each point in the picture face of Braun tube 25.
JP14472279A 1979-11-08 1979-11-08 Scanning electronic microscope Pending JPS5669760A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14472279A JPS5669760A (en) 1979-11-08 1979-11-08 Scanning electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14472279A JPS5669760A (en) 1979-11-08 1979-11-08 Scanning electronic microscope

Publications (1)

Publication Number Publication Date
JPS5669760A true JPS5669760A (en) 1981-06-11

Family

ID=15368784

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14472279A Pending JPS5669760A (en) 1979-11-08 1979-11-08 Scanning electronic microscope

Country Status (1)

Country Link
JP (1) JPS5669760A (en)

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