JPS5765656A - Limited view diffraction image device - Google Patents
Limited view diffraction image deviceInfo
- Publication number
- JPS5765656A JPS5765656A JP13984280A JP13984280A JPS5765656A JP S5765656 A JPS5765656 A JP S5765656A JP 13984280 A JP13984280 A JP 13984280A JP 13984280 A JP13984280 A JP 13984280A JP S5765656 A JPS5765656 A JP S5765656A
- Authority
- JP
- Japan
- Prior art keywords
- output
- diffraction image
- adder
- signal generating
- limited view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Abstract
PURPOSE:To improve the view efficiency by obtaining the correction current level synchronous with the current flowing through a deflection lens then lapping said correction current over the current flowing through an electron lens thereby obtaining the limited view diffraction image. CONSTITUTION:The outputs x, y from horizontal and vertical deflection signal generating circuits 11, 12 are amplified by amplifiers 8, 9 then provided to horizontal and vertical deflction lenses 2, 3. At the same time the outputs x, y are squared by square units 19, 20 in a correction signal generating circuit 17 then added by an adder 21. Thereafter said output (x<2>+y<2>) is provided to a multiplier 22 while the output k from a D.C. signal generating circuit 15 is multiplied and the output k(x<2>+y<2>) is provided through a switch 18 to an adder 13. Then the output from the adder 13 where the signal from the circuit 15 is overlapped is amplified and provided to an electron lens 4 to eliminate the spherical astigmatism automatically thereby one point on the specimen 5 can be angular scanned correctly. Consequently the limited view diffraction image can be obtained easily resulting in the improvement of the view efficiency.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13984280A JPS5765656A (en) | 1980-10-08 | 1980-10-08 | Limited view diffraction image device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13984280A JPS5765656A (en) | 1980-10-08 | 1980-10-08 | Limited view diffraction image device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5765656A true JPS5765656A (en) | 1982-04-21 |
JPS6240814B2 JPS6240814B2 (en) | 1987-08-31 |
Family
ID=15254777
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13984280A Granted JPS5765656A (en) | 1980-10-08 | 1980-10-08 | Limited view diffraction image device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5765656A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6050850A (en) * | 1983-08-31 | 1985-03-20 | Jeol Ltd | Scanning electron microscope |
JP2008112748A (en) * | 2008-02-04 | 2008-05-15 | Hitachi Ltd | Scanning type charged particle microscope, and its astigmatism correcting method |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63182516U (en) * | 1987-05-19 | 1988-11-24 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5945173A (en) * | 1982-09-08 | 1984-03-13 | Victor Co Of Japan Ltd | Thermotransfer type color printer |
-
1980
- 1980-10-08 JP JP13984280A patent/JPS5765656A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5945173A (en) * | 1982-09-08 | 1984-03-13 | Victor Co Of Japan Ltd | Thermotransfer type color printer |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6050850A (en) * | 1983-08-31 | 1985-03-20 | Jeol Ltd | Scanning electron microscope |
JPH0542102B2 (en) * | 1983-08-31 | 1993-06-25 | Nippon Electron Optics Lab | |
JP2008112748A (en) * | 2008-02-04 | 2008-05-15 | Hitachi Ltd | Scanning type charged particle microscope, and its astigmatism correcting method |
Also Published As
Publication number | Publication date |
---|---|
JPS6240814B2 (en) | 1987-08-31 |
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