JPS55136445A - Beam blanking deflector - Google Patents

Beam blanking deflector

Info

Publication number
JPS55136445A
JPS55136445A JP4250279A JP4250279A JPS55136445A JP S55136445 A JPS55136445 A JP S55136445A JP 4250279 A JP4250279 A JP 4250279A JP 4250279 A JP4250279 A JP 4250279A JP S55136445 A JPS55136445 A JP S55136445A
Authority
JP
Japan
Prior art keywords
condenser lens
deflectors
deflector
plural
blanking deflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4250279A
Other languages
Japanese (ja)
Inventor
Seigo Igaki
Akio Ito
Yasuo Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4250279A priority Critical patent/JPS55136445A/en
Publication of JPS55136445A publication Critical patent/JPS55136445A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To raise the quality of picture by providing plural deflectors between the first condenser lens and the second condenser lens and selecting a desired deflector from the plural deflectors according to the power voltage for the first condenser lens. CONSTITUTION:Plural deflectors 6-1-6-n, having a pair of electrostatic plates, are arranged along the light axis between the first condenser lens 2 and the second condenser lens 3 and then each connected to the switching circuits 9 and 9'. Also, the circuits 9 and 9' are connected through the encoder 11 to the power source 10 for the first condenser lens and also to the deflector-driving circuit 13 connected with the central controller (CPU) 12. According to the excitation current of the first condenser lens 2, a desired deflector is chosen from the deflectors 6-1-6-n.
JP4250279A 1979-04-10 1979-04-10 Beam blanking deflector Pending JPS55136445A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4250279A JPS55136445A (en) 1979-04-10 1979-04-10 Beam blanking deflector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4250279A JPS55136445A (en) 1979-04-10 1979-04-10 Beam blanking deflector

Publications (1)

Publication Number Publication Date
JPS55136445A true JPS55136445A (en) 1980-10-24

Family

ID=12637834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4250279A Pending JPS55136445A (en) 1979-04-10 1979-04-10 Beam blanking deflector

Country Status (1)

Country Link
JP (1) JPS55136445A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5815596A (en) * 1981-07-22 1983-01-28 タマ生化学株式会社 Removal of fatty acids from vegetable oil deodorized distillate oil
JPS6251218A (en) * 1985-08-30 1987-03-05 Hitachi Ltd Electron beam lithography equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5815596A (en) * 1981-07-22 1983-01-28 タマ生化学株式会社 Removal of fatty acids from vegetable oil deodorized distillate oil
JPS6251218A (en) * 1985-08-30 1987-03-05 Hitachi Ltd Electron beam lithography equipment
JPH0587014B2 (en) * 1985-08-30 1993-12-15 Hitachi Ltd

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