JPS5647117A - Surface elastic wave filter element - Google Patents
Surface elastic wave filter elementInfo
- Publication number
- JPS5647117A JPS5647117A JP12315079A JP12315079A JPS5647117A JP S5647117 A JPS5647117 A JP S5647117A JP 12315079 A JP12315079 A JP 12315079A JP 12315079 A JP12315079 A JP 12315079A JP S5647117 A JPS5647117 A JP S5647117A
- Authority
- JP
- Japan
- Prior art keywords
- sio2 film
- electrode
- filter element
- wave filter
- elastic wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
PURPOSE:To prevent electrodes from becomining narrow due to overetching, etc., by forming an SiO2 film at a part on a piezoelectric substrate other than parts where an input electrode and output electrode are formed. CONSTITUTION:On piezoelectric chip 11, SiO2 film 12 is formed to a thickness of 1,000-10,000Angstrom . Next, it is etched to remove the SiO2 film on the chip where an input electrode and output electrode are to be formed while leaving SiO2 film 13 that corresponds to the other part. On this chip, aluminum 14 is vapor-deposited and then etched to remove the part other than input electrode 15 and output electrode 16, forming input and output electrodes.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12315079A JPS5647117A (en) | 1979-09-27 | 1979-09-27 | Surface elastic wave filter element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12315079A JPS5647117A (en) | 1979-09-27 | 1979-09-27 | Surface elastic wave filter element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5647117A true JPS5647117A (en) | 1981-04-28 |
Family
ID=14853416
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12315079A Pending JPS5647117A (en) | 1979-09-27 | 1979-09-27 | Surface elastic wave filter element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5647117A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60144287A (en) * | 1983-12-28 | 1985-07-30 | 株式会社コシハラ | Overload controller for elevator |
JPH01285593A (en) * | 1988-05-13 | 1989-11-16 | Kato Works Co Ltd | Operating device with display means of safety degree for crane or the like |
US5645181A (en) * | 1992-02-12 | 1997-07-08 | Kato Works Co., Ltd. | Method for detecting a crane hook lifting distance |
US5730305A (en) * | 1988-12-27 | 1998-03-24 | Kato Works Co., Ltd. | Crane safety apparatus |
WO2010100967A1 (en) * | 2009-03-02 | 2010-09-10 | 株式会社村田製作所 | Surface acoustic wave device |
JP2014192676A (en) * | 2013-03-27 | 2014-10-06 | Panasonic Corp | Acoustic wave element |
-
1979
- 1979-09-27 JP JP12315079A patent/JPS5647117A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60144287A (en) * | 1983-12-28 | 1985-07-30 | 株式会社コシハラ | Overload controller for elevator |
JPH01285593A (en) * | 1988-05-13 | 1989-11-16 | Kato Works Co Ltd | Operating device with display means of safety degree for crane or the like |
US5730305A (en) * | 1988-12-27 | 1998-03-24 | Kato Works Co., Ltd. | Crane safety apparatus |
US5645181A (en) * | 1992-02-12 | 1997-07-08 | Kato Works Co., Ltd. | Method for detecting a crane hook lifting distance |
WO2010100967A1 (en) * | 2009-03-02 | 2010-09-10 | 株式会社村田製作所 | Surface acoustic wave device |
JP5321678B2 (en) * | 2009-03-02 | 2013-10-23 | 株式会社村田製作所 | Surface acoustic wave device |
JP2014192676A (en) * | 2013-03-27 | 2014-10-06 | Panasonic Corp | Acoustic wave element |
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