JPS54132188A - Elastic surface wave device - Google Patents

Elastic surface wave device

Info

Publication number
JPS54132188A
JPS54132188A JP4060378A JP4060378A JPS54132188A JP S54132188 A JPS54132188 A JP S54132188A JP 4060378 A JP4060378 A JP 4060378A JP 4060378 A JP4060378 A JP 4060378A JP S54132188 A JPS54132188 A JP S54132188A
Authority
JP
Japan
Prior art keywords
layer
metal
electrode
oxide
oxidizable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4060378A
Other languages
Japanese (ja)
Inventor
Mineo Ueki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP4060378A priority Critical patent/JPS54132188A/en
Publication of JPS54132188A publication Critical patent/JPS54132188A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H03H3/10—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves for obtaining desired frequency or temperature coefficient

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To secure easily the frequency-response properties within the allowable range with no variation for along period of time by constituting the roller-screen type electrode with the oxidizable metal and also forming the oxide of the oxidizable metal between adjacent electrode elements. CONSTITUTION:Oxidizable conductive metal layer 22 of Al or the like is formed on priezoelectric substrate 1, and then layer 22 is oxidized via mask layer 23 with electrode E1'' and E2'' formed under layer 23. At the same time, metal oxide 24 constituting E1'' and E2'' is formed between adjacent electrode element e1 and e2 of E1'' and E2'' each. After this, layer 23 is removed on E1'' and E2''. As a result, the frequency-response properties can be secured within the allowable range with no change for a long time of use although the properties may feature the dependency due to the mass effect of electrode E1 and E2 since E1 and E2 are oxidizable metal and the side surfaces of element e1 and e2 are covered with oxide 24 of the same metal.
JP4060378A 1978-04-06 1978-04-06 Elastic surface wave device Pending JPS54132188A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4060378A JPS54132188A (en) 1978-04-06 1978-04-06 Elastic surface wave device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4060378A JPS54132188A (en) 1978-04-06 1978-04-06 Elastic surface wave device

Publications (1)

Publication Number Publication Date
JPS54132188A true JPS54132188A (en) 1979-10-13

Family

ID=12585082

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4060378A Pending JPS54132188A (en) 1978-04-06 1978-04-06 Elastic surface wave device

Country Status (1)

Country Link
JP (1) JPS54132188A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61117913A (en) * 1984-11-13 1986-06-05 Alps Electric Co Ltd Surface acoustic wave element
JPS61136312A (en) * 1984-12-06 1986-06-24 Alps Electric Co Ltd Surface acoustic wave element

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5278342A (en) * 1975-12-25 1977-07-01 Nec Corp Manufacture of elastic surface wave rattan-shaped electrode

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5278342A (en) * 1975-12-25 1977-07-01 Nec Corp Manufacture of elastic surface wave rattan-shaped electrode

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61117913A (en) * 1984-11-13 1986-06-05 Alps Electric Co Ltd Surface acoustic wave element
JPS61136312A (en) * 1984-12-06 1986-06-24 Alps Electric Co Ltd Surface acoustic wave element

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