JPS54132188A - Elastic surface wave device - Google Patents
Elastic surface wave deviceInfo
- Publication number
- JPS54132188A JPS54132188A JP4060378A JP4060378A JPS54132188A JP S54132188 A JPS54132188 A JP S54132188A JP 4060378 A JP4060378 A JP 4060378A JP 4060378 A JP4060378 A JP 4060378A JP S54132188 A JPS54132188 A JP S54132188A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- metal
- electrode
- oxide
- oxidizable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
- H03H3/10—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves for obtaining desired frequency or temperature coefficient
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
PURPOSE:To secure easily the frequency-response properties within the allowable range with no variation for along period of time by constituting the roller-screen type electrode with the oxidizable metal and also forming the oxide of the oxidizable metal between adjacent electrode elements. CONSTITUTION:Oxidizable conductive metal layer 22 of Al or the like is formed on priezoelectric substrate 1, and then layer 22 is oxidized via mask layer 23 with electrode E1'' and E2'' formed under layer 23. At the same time, metal oxide 24 constituting E1'' and E2'' is formed between adjacent electrode element e1 and e2 of E1'' and E2'' each. After this, layer 23 is removed on E1'' and E2''. As a result, the frequency-response properties can be secured within the allowable range with no change for a long time of use although the properties may feature the dependency due to the mass effect of electrode E1 and E2 since E1 and E2 are oxidizable metal and the side surfaces of element e1 and e2 are covered with oxide 24 of the same metal.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4060378A JPS54132188A (en) | 1978-04-06 | 1978-04-06 | Elastic surface wave device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4060378A JPS54132188A (en) | 1978-04-06 | 1978-04-06 | Elastic surface wave device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54132188A true JPS54132188A (en) | 1979-10-13 |
Family
ID=12585082
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4060378A Pending JPS54132188A (en) | 1978-04-06 | 1978-04-06 | Elastic surface wave device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54132188A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61117913A (en) * | 1984-11-13 | 1986-06-05 | Alps Electric Co Ltd | Surface acoustic wave element |
JPS61136312A (en) * | 1984-12-06 | 1986-06-24 | Alps Electric Co Ltd | Surface acoustic wave element |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5278342A (en) * | 1975-12-25 | 1977-07-01 | Nec Corp | Manufacture of elastic surface wave rattan-shaped electrode |
-
1978
- 1978-04-06 JP JP4060378A patent/JPS54132188A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5278342A (en) * | 1975-12-25 | 1977-07-01 | Nec Corp | Manufacture of elastic surface wave rattan-shaped electrode |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61117913A (en) * | 1984-11-13 | 1986-06-05 | Alps Electric Co Ltd | Surface acoustic wave element |
JPS61136312A (en) * | 1984-12-06 | 1986-06-24 | Alps Electric Co Ltd | Surface acoustic wave element |
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