JPS5645027A - Electron beam lithography - Google Patents
Electron beam lithographyInfo
- Publication number
- JPS5645027A JPS5645027A JP12122079A JP12122079A JPS5645027A JP S5645027 A JPS5645027 A JP S5645027A JP 12122079 A JP12122079 A JP 12122079A JP 12122079 A JP12122079 A JP 12122079A JP S5645027 A JPS5645027 A JP S5645027A
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- width
- electron beam
- scanning direction
- pitch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Analytical Chemistry (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE:To permit a simple electron beam lithography to reduce the proximity effect and to obtain a desired resist pattern by setting the half-width of an electron beam spot in the scanning direction so as to be smaller than the scanning pitch. CONSTITUTION:When lithography is performed by scanning with a spotlike electron beam, the half-width of the electron beam spot at least in the scanning direction is set to be smaller than the scanning pitch, preferably, the half-width is set to be 2/5-3/5 of the scanning pitch. This permits the proximity effect to be greatly reduced, and thus any pattern, large or small, to be obtained more close to a desired geometry and dimension. Moreover, it is effective to set the half-width A1 in the direction perpendicular to the scanning direction so as to be almost equal to the scanning pitch B, and the half-width A2 in the scanning direction to be a smaller ellipse than the scanning pitch B. This permits the pattern edge perpendicular to the scanning direction to be almost straight as well as the proximity effect to be reduced by the difference between the half-width A2 and the scanning pitch B, so that a desired resist pattern is obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12122079A JPS5645027A (en) | 1979-09-20 | 1979-09-20 | Electron beam lithography |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12122079A JPS5645027A (en) | 1979-09-20 | 1979-09-20 | Electron beam lithography |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5645027A true JPS5645027A (en) | 1981-04-24 |
Family
ID=14805855
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12122079A Pending JPS5645027A (en) | 1979-09-20 | 1979-09-20 | Electron beam lithography |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5645027A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0247404U (en) * | 1988-09-28 | 1990-03-30 | ||
JPH0558868U (en) * | 1992-01-17 | 1993-08-03 | 株式会社神戸製鋼所 | Gas engine |
JP2005032838A (en) * | 2003-07-08 | 2005-02-03 | Canon Inc | Method and device for charged particle beam lithography and method of manufacturing device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5136188A (en) * | 1974-07-22 | 1976-03-26 | Varian Associates |
-
1979
- 1979-09-20 JP JP12122079A patent/JPS5645027A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5136188A (en) * | 1974-07-22 | 1976-03-26 | Varian Associates |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0247404U (en) * | 1988-09-28 | 1990-03-30 | ||
JPH0558868U (en) * | 1992-01-17 | 1993-08-03 | 株式会社神戸製鋼所 | Gas engine |
JP2005032838A (en) * | 2003-07-08 | 2005-02-03 | Canon Inc | Method and device for charged particle beam lithography and method of manufacturing device |
JP4494734B2 (en) * | 2003-07-08 | 2010-06-30 | キヤノン株式会社 | Charged particle beam drawing method, charged particle beam exposure apparatus, and device manufacturing method |
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