JPS5291361A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
JPS5291361A
JPS5291361A JP760576A JP760576A JPS5291361A JP S5291361 A JPS5291361 A JP S5291361A JP 760576 A JP760576 A JP 760576A JP 760576 A JP760576 A JP 760576A JP S5291361 A JPS5291361 A JP S5291361A
Authority
JP
Japan
Prior art keywords
electron microscope
scanning electron
resolulation
astigmatism
deflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP760576A
Other languages
Japanese (ja)
Inventor
Nobuaki Tamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP760576A priority Critical patent/JPS5291361A/en
Publication of JPS5291361A publication Critical patent/JPS5291361A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent the deflection of electron beams due to extending electric field by providing a shielding cylinder under a converging lens thereby avoiding generation of astigmatism and reduction in resolulation.
COPYRIGHT: (C)1977,JPO&Japio
JP760576A 1976-01-27 1976-01-27 Scanning electron microscope Pending JPS5291361A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP760576A JPS5291361A (en) 1976-01-27 1976-01-27 Scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP760576A JPS5291361A (en) 1976-01-27 1976-01-27 Scanning electron microscope

Publications (1)

Publication Number Publication Date
JPS5291361A true JPS5291361A (en) 1977-08-01

Family

ID=11670424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP760576A Pending JPS5291361A (en) 1976-01-27 1976-01-27 Scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS5291361A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55110908A (en) * 1979-02-21 1980-08-27 Hitachi Ltd Measuring device
JPS60243959A (en) * 1984-05-18 1985-12-03 Hitachi Ltd Scanning electron microscope
US5387793A (en) * 1992-10-15 1995-02-07 Hitachi, Ltd. Scanning electron microscope

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55110908A (en) * 1979-02-21 1980-08-27 Hitachi Ltd Measuring device
JPS60243959A (en) * 1984-05-18 1985-12-03 Hitachi Ltd Scanning electron microscope
US5387793A (en) * 1992-10-15 1995-02-07 Hitachi, Ltd. Scanning electron microscope

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