JPS5633535A - Selective gas sensor - Google Patents

Selective gas sensor

Info

Publication number
JPS5633535A
JPS5633535A JP11532780A JP11532780A JPS5633535A JP S5633535 A JPS5633535 A JP S5633535A JP 11532780 A JP11532780 A JP 11532780A JP 11532780 A JP11532780 A JP 11532780A JP S5633535 A JPS5633535 A JP S5633535A
Authority
JP
Japan
Prior art keywords
oxide semiconductor
metal
layers
layer
gas sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11532780A
Other languages
English (en)
Inventor
Toraiteinga Ruutouitsuhi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of JPS5633535A publication Critical patent/JPS5633535A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP11532780A 1979-08-22 1980-08-21 Selective gas sensor Pending JPS5633535A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2933971A DE2933971C2 (de) 1979-08-22 1979-08-22 Gassensor hoher Empfindlichkeit und Stabilität zum Nachweis und zur Messung des Verunreinigungsgehaltes von Luft auf der Basis von Metalloxidhalbleitern

Publications (1)

Publication Number Publication Date
JPS5633535A true JPS5633535A (en) 1981-04-04

Family

ID=6079037

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11532780A Pending JPS5633535A (en) 1979-08-22 1980-08-21 Selective gas sensor

Country Status (5)

Country Link
EP (1) EP0024679B1 (ja)
JP (1) JPS5633535A (ja)
AT (1) ATE3470T1 (ja)
BR (1) BR8005296A (ja)
DE (1) DE2933971C2 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5879149A (ja) * 1981-11-05 1983-05-12 Fuigaro Giken Kk ガス検出素子
JPS5879150A (ja) * 1981-11-05 1983-05-12 Fuigaro Giken Kk ガス検出方法
JPS60149957A (ja) * 1984-01-17 1985-08-07 Toshiba Corp 感ガス素子
WO1997039342A1 (fr) * 1996-04-18 1997-10-23 Mikuni Corporation Detecteur de gaz et procede de fabrication
US6087924A (en) * 1996-04-18 2000-07-11 Mikuni Corporation Gas sensors and methods of manufacturing the same
JP2002031615A (ja) * 2000-07-13 2002-01-31 Fis Kk ケトン感応素子

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3322481A1 (de) * 1983-06-22 1985-01-03 Siemens AG, 1000 Berlin und 8000 München Duennschicht-gassensor zum nachweis und zur messung von gasfoermigen kohlenwasserstoff-verunreinigungen mit doppel- und dreifachbindungen, insbesondere von acetylen, in luft sowie ein verfahren zu seiner herstellung
GB8602544D0 (en) * 1986-02-03 1986-03-12 Atomic Energy Authority Uk Sensor
DE3604594A1 (de) * 1986-02-14 1987-08-20 Schott Glaswerke Duennfilmgassensoren mit hoher messempfindlichkeit als mehrschichtsysteme auf der basis von indiumoxid-tauchschichten zum nachweis von gasspuren in traegergasen
DE4402117C2 (de) * 1994-01-25 1995-11-23 Siemens Matsushita Components Hochtemperatur-Gassensor und Verfahren zu seiner Herstellung
DE10133466B4 (de) * 2001-07-10 2007-10-11 Paragon Ag Schichtverbund und mikromechanisches Sensorelement, insbesondere Gassensorelement, mit diesem Schichtverbund
NL2021056B1 (en) * 2018-06-05 2019-12-11 Univ Delft Tech Hydrogen gas sensing with single-crystal WO3 ultra-thin films
CN114235903A (zh) * 2020-09-09 2022-03-25 中国科学院苏州纳米技术与纳米仿生研究所 一种气体传感器及其制作方法
CN113189148B (zh) * 2021-03-18 2024-03-19 西安电子科技大学芜湖研究院 一种氧化铟基褶皱微球用于乙醇检测的方法及应用

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3695848A (en) * 1970-04-07 1972-10-03 Naoyoshi Taguchi Gas detecting device
JPS517995A (en) * 1974-06-14 1976-01-22 Hitachi Ltd Gasusensa zairyo
US3999947A (en) * 1974-10-11 1976-12-28 Matsushita Electric Industrial Co., Ltd. Reducing gas sensor and a method of producing the same
GB1477082A (en) * 1974-10-15 1977-06-22 Tokyo Shibaura Electric Co Gas-sensing material
US4045178A (en) * 1975-11-08 1977-08-30 Matsushita Electric Industrial Co., Ltd. Reducing gas sensor
US4224280A (en) * 1977-07-18 1980-09-23 Fuji Electric Co., Ltd. Carbon monoxide detecting device
JPS5421397A (en) * 1977-07-18 1979-02-17 Fuji Electric Co Ltd Carbon monoxide detector
DE2735222A1 (de) * 1977-08-04 1979-02-15 Siemens Ag Verfahren und vorrichtung zur messung des aethylalkoholgehaltes von luft

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5879149A (ja) * 1981-11-05 1983-05-12 Fuigaro Giken Kk ガス検出素子
JPS5879150A (ja) * 1981-11-05 1983-05-12 Fuigaro Giken Kk ガス検出方法
JPH0249465B2 (ja) * 1981-11-05 1990-10-30 Figaro Eng
JPS60149957A (ja) * 1984-01-17 1985-08-07 Toshiba Corp 感ガス素子
JPH0380257B2 (ja) * 1984-01-17 1991-12-24 Tokyo Shibaura Electric Co
WO1997039342A1 (fr) * 1996-04-18 1997-10-23 Mikuni Corporation Detecteur de gaz et procede de fabrication
US6087924A (en) * 1996-04-18 2000-07-11 Mikuni Corporation Gas sensors and methods of manufacturing the same
JP2002031615A (ja) * 2000-07-13 2002-01-31 Fis Kk ケトン感応素子

Also Published As

Publication number Publication date
DE2933971C2 (de) 1983-12-15
DE2933971A1 (de) 1981-03-26
BR8005296A (pt) 1981-03-04
EP0024679A1 (de) 1981-03-11
EP0024679B1 (de) 1983-05-18
ATE3470T1 (de) 1983-06-15

Similar Documents

Publication Publication Date Title
JPS5633535A (en) Selective gas sensor
JPS51147191A (en) Hall element and its method of manufacturing
EP0046989A3 (en) Selective thin-coat gas sensor with high sensitivity and stability to detect and measure gaseous organic pollutants in the air on the basis of tungsten semi-conductor oxide, and method of producing the same
EP0131731A3 (en) Thin layer gas sensing element for detecting and measuring hydrocarbon pollutants having two or three acetylene bonds with the air, and process for its manufacture
JPS56154648A (en) Measurement of semiconductor impurity concentration
Torvela et al. Reduction of the interference caused by NO and SO2 in the CO response of Pd-catalysed SnO2 combustion gas sensors
JPS53131081A (en) Thermometer
DE3775165D1 (de) Stromsensor und verfahren zum erfassen des stromflusses in auszuwertenden leitern.
ES440727A1 (es) Perfeccionamientos en sondas para la determinacion yno la medicion de alcohol.
JPS5337077A (en) Probe for tester
JPS5773623A (en) Measuring device for quantity of air flow
JPS5312373A (en) Measuring apparatus for temperature difference
JPS5529758A (en) Detector employing extremely-fine corpuscule resist film
JPS5740640A (en) Temperature compensating method in humidity measuring device
JPS56118658A (en) Gas detecting element
JPS5796248A (en) Detecting method for gas using superparticulate gas sensor
JPS55117955A (en) Semiconductor sensor and impurity detection method
JPS5333193A (en) Measuring apparatus of transformed quantity at diffusion welding
JPS5244688A (en) Method of automatically measuring density of oxygen
JPS5626251A (en) Detecting method for chemical material using chemical sensor having insulated gate type transistor structure
JPS5657946A (en) Humidity-sensitive element
JPS55159146A (en) Gas detector
JPS5242191A (en) Air abnormality measuring device
JPS5629341A (en) Measurement of properties of semiconductor device
JPS5726739A (en) Method for measuring humidity