JPS56133877A - Semiconductor diaphragm type sensor - Google Patents
Semiconductor diaphragm type sensorInfo
- Publication number
- JPS56133877A JPS56133877A JP3775480A JP3775480A JPS56133877A JP S56133877 A JPS56133877 A JP S56133877A JP 3775480 A JP3775480 A JP 3775480A JP 3775480 A JP3775480 A JP 3775480A JP S56133877 A JPS56133877 A JP S56133877A
- Authority
- JP
- Japan
- Prior art keywords
- thick
- strain producing
- single crystal
- rigid body
- semiconductor single
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 5
- 239000013078 crystal Substances 0.000 abstract 4
- 238000000034 method Methods 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 239000003513 alkali Substances 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3775480A JPS56133877A (en) | 1980-03-24 | 1980-03-24 | Semiconductor diaphragm type sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3775480A JPS56133877A (en) | 1980-03-24 | 1980-03-24 | Semiconductor diaphragm type sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56133877A true JPS56133877A (en) | 1981-10-20 |
Family
ID=12506251
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3775480A Pending JPS56133877A (en) | 1980-03-24 | 1980-03-24 | Semiconductor diaphragm type sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56133877A (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61154179A (ja) * | 1984-12-27 | 1986-07-12 | Nec Corp | 圧力センサ |
JPS61154180A (ja) * | 1984-12-27 | 1986-07-12 | Nec Corp | 圧力センサ |
JPS62158367A (ja) * | 1985-12-28 | 1987-07-14 | Anritsu Corp | 圧力センサ |
US5233213A (en) * | 1990-07-14 | 1993-08-03 | Robert Bosch Gmbh | Silicon-mass angular acceleration sensor |
JP2009300197A (ja) * | 2008-06-12 | 2009-12-24 | Alps Electric Co Ltd | 半導体圧力センサ |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5169678A (ja) * | 1974-11-06 | 1976-06-16 | Philips Nv |
-
1980
- 1980-03-24 JP JP3775480A patent/JPS56133877A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5169678A (ja) * | 1974-11-06 | 1976-06-16 | Philips Nv |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61154179A (ja) * | 1984-12-27 | 1986-07-12 | Nec Corp | 圧力センサ |
JPS61154180A (ja) * | 1984-12-27 | 1986-07-12 | Nec Corp | 圧力センサ |
JPS62158367A (ja) * | 1985-12-28 | 1987-07-14 | Anritsu Corp | 圧力センサ |
JPH0564866B2 (ja) * | 1985-12-28 | 1993-09-16 | Anritsu Corp | |
US5233213A (en) * | 1990-07-14 | 1993-08-03 | Robert Bosch Gmbh | Silicon-mass angular acceleration sensor |
JP2009300197A (ja) * | 2008-06-12 | 2009-12-24 | Alps Electric Co Ltd | 半導体圧力センサ |
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