JPS5610239A - Electron beam macroanalyzer - Google Patents
Electron beam macroanalyzerInfo
- Publication number
- JPS5610239A JPS5610239A JP8624679A JP8624679A JPS5610239A JP S5610239 A JPS5610239 A JP S5610239A JP 8624679 A JP8624679 A JP 8624679A JP 8624679 A JP8624679 A JP 8624679A JP S5610239 A JPS5610239 A JP S5610239A
- Authority
- JP
- Japan
- Prior art keywords
- point
- spectroscope
- rays
- sample
- slab sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE:To improve measuring precision by a system wherein a sample surface height detector is provided, and a spectroscope is moved according to its output. CONSTITUTION:A pair of ionnization boxes 14, 15 are arranged symmetrically on both sides of first collimator 7, and a constitution is such that fluorescent X-rays are incident uniformly so long as a point Q arising on the top of a slab sample 2 whereat an electron beam is applied is positioned on an extension of an optical axis of a spectroscope 16. Where the slab sample 2 is conveyed in the direction 3 indicated by arrow and the sample surface height right beneath an electron gun 4 fluctuates vertically in accordance with the flatness of the upper surface of the slab sample 2, the point Q is shaded by each edge at the lower end of the first collimator 7, there arises a difference in the quantity of X-rays incident between both the ionization boxes 14, 15, a servomotor 11 is driven through a motor driving circuit 12 for correction of said difference, and the spectroscope 16 is turned with a point P as a supporting point. Therefore, fluorescent X-rays are led into a detector 10 at a uniform ratio regardless of the flatness of the slab sample surface.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8624679A JPS5610239A (en) | 1979-07-06 | 1979-07-06 | Electron beam macroanalyzer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8624679A JPS5610239A (en) | 1979-07-06 | 1979-07-06 | Electron beam macroanalyzer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5610239A true JPS5610239A (en) | 1981-02-02 |
Family
ID=13881449
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8624679A Pending JPS5610239A (en) | 1979-07-06 | 1979-07-06 | Electron beam macroanalyzer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5610239A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58192693A (en) * | 1982-05-07 | 1983-11-10 | Ishikawajima Harima Heavy Ind Co Ltd | Shape of butt welding groove of pipes |
JPH06199292A (en) * | 1992-06-30 | 1994-07-19 | Kawasaki Heavy Ind Ltd | Multi-axis side stick controller for aircraft |
KR101387844B1 (en) * | 2008-02-22 | 2014-04-22 | 에스아이아이 나노 테크놀로지 가부시키가이샤 | X-ray analyzing apparatus and x-ray analyzing method |
-
1979
- 1979-07-06 JP JP8624679A patent/JPS5610239A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58192693A (en) * | 1982-05-07 | 1983-11-10 | Ishikawajima Harima Heavy Ind Co Ltd | Shape of butt welding groove of pipes |
JPH0223278B2 (en) * | 1982-05-07 | 1990-05-23 | Ishikawajima Harima Heavy Ind | |
JPH06199292A (en) * | 1992-06-30 | 1994-07-19 | Kawasaki Heavy Ind Ltd | Multi-axis side stick controller for aircraft |
KR101387844B1 (en) * | 2008-02-22 | 2014-04-22 | 에스아이아이 나노 테크놀로지 가부시키가이샤 | X-ray analyzing apparatus and x-ray analyzing method |
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