JPS5586116A - Drier - Google Patents
DrierInfo
- Publication number
- JPS5586116A JPS5586116A JP15854478A JP15854478A JPS5586116A JP S5586116 A JPS5586116 A JP S5586116A JP 15854478 A JP15854478 A JP 15854478A JP 15854478 A JP15854478 A JP 15854478A JP S5586116 A JPS5586116 A JP S5586116A
- Authority
- JP
- Japan
- Prior art keywords
- drying
- wafer
- pusher
- cup
- washing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15854478A JPS5586116A (en) | 1978-12-25 | 1978-12-25 | Drier |
US06/061,049 US4282825A (en) | 1978-08-02 | 1979-07-26 | Surface treatment device |
DE19792931308 DE2931308A1 (de) | 1978-08-02 | 1979-08-01 | Oberflaechenbehandlungs-einrichtung |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15854478A JPS5586116A (en) | 1978-12-25 | 1978-12-25 | Drier |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5586116A true JPS5586116A (en) | 1980-06-28 |
Family
ID=15674018
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15854478A Pending JPS5586116A (en) | 1978-08-02 | 1978-12-25 | Drier |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5586116A (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57154835A (en) * | 1981-03-20 | 1982-09-24 | Hitachi Ltd | Method and apparatus for drying tabular material |
JPS581630U (ja) * | 1981-06-29 | 1983-01-07 | 三菱重工業株式会社 | 高圧ゲ−トの扉体構造 |
JPS6030140A (ja) * | 1983-07-28 | 1985-02-15 | Fujitsu Ltd | スピンドライヤ |
JPS6064436A (ja) * | 1983-09-19 | 1985-04-13 | Fujitsu Ltd | スピンドライヤ |
JPS6373626A (ja) * | 1986-09-17 | 1988-04-04 | Hitachi Ltd | 処理装置 |
EP1571694A1 (en) * | 2002-12-10 | 2005-09-07 | Nikon Corporation | Exposure apparatus and method for manufacturing device |
US10566217B2 (en) | 2018-03-27 | 2020-02-18 | Global Unichip Corporation | Drying apparatus |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5377460A (en) * | 1976-12-21 | 1978-07-08 | Sony Corp | Washing unit of semiconductor wafer |
JPS53138278A (en) * | 1977-05-10 | 1978-12-02 | Toshiba Corp | Drier for wafer |
-
1978
- 1978-12-25 JP JP15854478A patent/JPS5586116A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5377460A (en) * | 1976-12-21 | 1978-07-08 | Sony Corp | Washing unit of semiconductor wafer |
JPS53138278A (en) * | 1977-05-10 | 1978-12-02 | Toshiba Corp | Drier for wafer |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57154835A (en) * | 1981-03-20 | 1982-09-24 | Hitachi Ltd | Method and apparatus for drying tabular material |
JPS581630U (ja) * | 1981-06-29 | 1983-01-07 | 三菱重工業株式会社 | 高圧ゲ−トの扉体構造 |
JPS6030140A (ja) * | 1983-07-28 | 1985-02-15 | Fujitsu Ltd | スピンドライヤ |
JPS6064436A (ja) * | 1983-09-19 | 1985-04-13 | Fujitsu Ltd | スピンドライヤ |
JPS6373626A (ja) * | 1986-09-17 | 1988-04-04 | Hitachi Ltd | 処理装置 |
EP1571694A1 (en) * | 2002-12-10 | 2005-09-07 | Nikon Corporation | Exposure apparatus and method for manufacturing device |
EP1571694A4 (en) * | 2002-12-10 | 2008-10-15 | Nikon Corp | EXPOSURE APPARATUS AND METHOD FOR MANUFACTURING THE DEVICE |
US8034539B2 (en) | 2002-12-10 | 2011-10-11 | Nikon Corporation | Exposure apparatus and method for producing device |
US10566217B2 (en) | 2018-03-27 | 2020-02-18 | Global Unichip Corporation | Drying apparatus |
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