JPS5583316A - Electrode structure of tuning-fork type crystal vibrator - Google Patents
Electrode structure of tuning-fork type crystal vibratorInfo
- Publication number
- JPS5583316A JPS5583316A JP15806478A JP15806478A JPS5583316A JP S5583316 A JPS5583316 A JP S5583316A JP 15806478 A JP15806478 A JP 15806478A JP 15806478 A JP15806478 A JP 15806478A JP S5583316 A JPS5583316 A JP S5583316A
- Authority
- JP
- Japan
- Prior art keywords
- flank
- tuning
- fork type
- crystal piece
- constitution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title abstract 7
- 229910052804 chromium Inorganic materials 0.000 abstract 2
- 238000000151 deposition Methods 0.000 abstract 2
- 229910052737 gold Inorganic materials 0.000 abstract 2
- 229910052759 nickel Inorganic materials 0.000 abstract 2
- 229910052709 silver Inorganic materials 0.000 abstract 2
- 238000003486 chemical etching Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000007769 metal material Substances 0.000 abstract 1
- 238000005498 polishing Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE:To reduce cost by chemical etching by making an electrode on the main surface of a tuning-fork type crystal piece different in constitution from that on its flank. CONSTITUTION:On both top and reverse main surfaces of a crystal thin plate finished by polishing, thin layers of Cr and Au or Au are vapor-deposited and patterned to provide electrodes, which are etched into a crystal piece in a fixed shape. Then, an electrode covering great part of the flank and extending partially to main surfaces is formed by vapor-depositing Cr, Ni and Ag, Ni and Ag, or Ag only in sequence. In this case, a vapor-depositing source is slanted at an angle of 45 deg. to the flank of the tuning-fork type crystal piece to increase the number of crystal pieces which can be obtained from one crystal piece. In this constitution, expensive metal is not used as a great quantity of a metal material used to form a flank electrode of constant film thickness in a narrow clearance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15806478A JPS5583316A (en) | 1978-12-20 | 1978-12-20 | Electrode structure of tuning-fork type crystal vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15806478A JPS5583316A (en) | 1978-12-20 | 1978-12-20 | Electrode structure of tuning-fork type crystal vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5583316A true JPS5583316A (en) | 1980-06-23 |
Family
ID=15663502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15806478A Pending JPS5583316A (en) | 1978-12-20 | 1978-12-20 | Electrode structure of tuning-fork type crystal vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5583316A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59125129U (en) * | 1983-02-08 | 1984-08-23 | 日本電波工業株式会社 | tuning fork crystal oscillator |
| WO2000005812A1 (en) * | 1998-07-24 | 2000-02-03 | Seiko Epson Corporation | Piezo-oscillator and production method thereof |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS544094A (en) * | 1977-06-13 | 1979-01-12 | Matsushima Kogyo Kk | Tuning fork piezooelectric vibrator |
-
1978
- 1978-12-20 JP JP15806478A patent/JPS5583316A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS544094A (en) * | 1977-06-13 | 1979-01-12 | Matsushima Kogyo Kk | Tuning fork piezooelectric vibrator |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59125129U (en) * | 1983-02-08 | 1984-08-23 | 日本電波工業株式会社 | tuning fork crystal oscillator |
| WO2000005812A1 (en) * | 1998-07-24 | 2000-02-03 | Seiko Epson Corporation | Piezo-oscillator and production method thereof |
| US6661162B1 (en) | 1998-07-24 | 2003-12-09 | Seiko Epson Corporation | Piezoelectric resonator and method of producing the same |
| US6961981B2 (en) | 1998-07-24 | 2005-11-08 | Seiko Epson Corporation | Method of producing a piezoelectric resonator |
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