JPS5578235A - Sensor and its manufacture - Google Patents

Sensor and its manufacture

Info

Publication number
JPS5578235A
JPS5578235A JP15240178A JP15240178A JPS5578235A JP S5578235 A JPS5578235 A JP S5578235A JP 15240178 A JP15240178 A JP 15240178A JP 15240178 A JP15240178 A JP 15240178A JP S5578235 A JPS5578235 A JP S5578235A
Authority
JP
Japan
Prior art keywords
film
supermicro
metal oxide
particles
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15240178A
Other languages
Japanese (ja)
Other versions
JPS588743B2 (en
Inventor
Masahiro Nishikawa
Kuni Ogawa
Atsushi Abe
Satoshi Sekido
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP53152401A priority Critical patent/JPS588743B2/en
Publication of JPS5578235A publication Critical patent/JPS5578235A/en
Publication of JPS588743B2 publication Critical patent/JPS588743B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To obtain the sensor which can detect gas and water vapor in high sensitivity, by forming oxide supermicro particle film on the insulating support providing electrode and forming Pd supermicro particle film on the film under inactive gas atmosphere.
CONSTITUTION: The electrodes 2, 3 of pair are formed on the insulation substrate 1 of glass and ceramic, and the supermicro particle film 4 of metal oxide such as Sn, Ti, Zn and Ni is formed with vacuum evaporation method. Pd microparticle film or Pd supermicro particles and the hybrid film 5 with the said metal oxide supermicro particles are evaporated on the film 4 under inactive gas atmosphere to obtain the sensor for gas and water content detection. The film thickness of the Pd supermicron particle film 5 is around several μm and the average particle diameter is several tens to hundreds of Å the same as the metal oxide supermicron particles.
COPYRIGHT: (C)1980,JPO&Japio
JP53152401A 1978-12-08 1978-12-08 Gas/humidity sensor Expired JPS588743B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53152401A JPS588743B2 (en) 1978-12-08 1978-12-08 Gas/humidity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53152401A JPS588743B2 (en) 1978-12-08 1978-12-08 Gas/humidity sensor

Publications (2)

Publication Number Publication Date
JPS5578235A true JPS5578235A (en) 1980-06-12
JPS588743B2 JPS588743B2 (en) 1983-02-17

Family

ID=15539698

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53152401A Expired JPS588743B2 (en) 1978-12-08 1978-12-08 Gas/humidity sensor

Country Status (1)

Country Link
JP (1) JPS588743B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58105049A (en) * 1981-12-17 1983-06-22 Matsushita Electric Ind Co Ltd Detector of no2 gas and detecting method therefor
US4423407A (en) * 1981-02-27 1983-12-27 Dart Industries Inc. Apparatus and method for measuring the concentration of gases
US4441073A (en) * 1980-12-22 1984-04-03 Electric Power Research Institute, Inc. Resistivity sensor system for detecting faults in sealed gas-insulated electrical apparatus
JPS5990040A (en) * 1982-11-15 1984-05-24 Matsushita Electric Ind Co Ltd Detector for gaseous carbon monoxide
US4731226A (en) * 1985-06-24 1988-03-15 Figaro Engineering Inc. Gas sensor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62288361A (en) * 1986-06-06 1987-12-15 Nissan Motor Co Ltd Fuel injection pump

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4441073A (en) * 1980-12-22 1984-04-03 Electric Power Research Institute, Inc. Resistivity sensor system for detecting faults in sealed gas-insulated electrical apparatus
US4423407A (en) * 1981-02-27 1983-12-27 Dart Industries Inc. Apparatus and method for measuring the concentration of gases
JPS58105049A (en) * 1981-12-17 1983-06-22 Matsushita Electric Ind Co Ltd Detector of no2 gas and detecting method therefor
JPS5990040A (en) * 1982-11-15 1984-05-24 Matsushita Electric Ind Co Ltd Detector for gaseous carbon monoxide
US4731226A (en) * 1985-06-24 1988-03-15 Figaro Engineering Inc. Gas sensor

Also Published As

Publication number Publication date
JPS588743B2 (en) 1983-02-17

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