JPS55159147A - Production of sensor - Google Patents
Production of sensorInfo
- Publication number
- JPS55159147A JPS55159147A JP6813879A JP6813879A JPS55159147A JP S55159147 A JPS55159147 A JP S55159147A JP 6813879 A JP6813879 A JP 6813879A JP 6813879 A JP6813879 A JP 6813879A JP S55159147 A JPS55159147 A JP S55159147A
- Authority
- JP
- Japan
- Prior art keywords
- oxide
- gas
- substrate
- letting
- alcohol
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To enable detection of the densities of gas, alcohol and steam respectively independently with high sensitivity simply through changing of measuring temperature by letting Cu or its oxide evaporate in an O2 atmosphere, and letting the same deposit on a supporting substrate thereby forming the ultrafine particle film of the Cu oxide.
CONSTITUTION: A supporting substrate (glass plate or the like) 3 is held to the sample holder 2 in a vacuum evaporation appratus 1. Evaporating material 5 such as Cu, CuO, or Cu2O is put into a boat 4. The inside of the apparatus 1 is evacuated to a vacuum through an exhaust port 6, after which O2 gas is put therein through a lead-in port 7 to about 0.1W5torr. Electric current is supplied from an electric source 8 to heat the same so that the ultrafine particle film 11 of Cu oxide is formed to a thickness of about 10μ on the substrate 3. Beforehand, a pair of electrodes 9, 10 are formed by vacuum evaporation or the like on the substrate 3. The detecting element obtained in this way is capable of selectively detecting steam at room temperature, alcohol at around 300°C and isobutane gas at around 500°C.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6813879A JPS55159147A (en) | 1979-05-30 | 1979-05-30 | Production of sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6813879A JPS55159147A (en) | 1979-05-30 | 1979-05-30 | Production of sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55159147A true JPS55159147A (en) | 1980-12-11 |
| JPS6133376B2 JPS6133376B2 (en) | 1986-08-01 |
Family
ID=13365077
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6813879A Granted JPS55159147A (en) | 1979-05-30 | 1979-05-30 | Production of sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55159147A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61151014A (en) * | 1984-12-24 | 1986-07-09 | Ulvac Corp | Production of ultrafine powder of metallic carbide |
| JPH0667977U (en) * | 1993-02-26 | 1994-09-22 | 株式会社キッツ | Valve actuator |
| KR100305660B1 (en) * | 1999-02-09 | 2001-09-26 | 김희용 | Gas sensors for sulfur compound gas detection, and their fabrication method with CuO addition by dual lon beam sputtering |
-
1979
- 1979-05-30 JP JP6813879A patent/JPS55159147A/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61151014A (en) * | 1984-12-24 | 1986-07-09 | Ulvac Corp | Production of ultrafine powder of metallic carbide |
| JPH0377125B2 (en) * | 1984-12-24 | 1991-12-09 | Ulvac Corp | |
| JPH0667977U (en) * | 1993-02-26 | 1994-09-22 | 株式会社キッツ | Valve actuator |
| KR100305660B1 (en) * | 1999-02-09 | 2001-09-26 | 김희용 | Gas sensors for sulfur compound gas detection, and their fabrication method with CuO addition by dual lon beam sputtering |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6133376B2 (en) | 1986-08-01 |
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