JPS5575235A - Method of fabricating semiconductor device - Google Patents
Method of fabricating semiconductor deviceInfo
- Publication number
- JPS5575235A JPS5575235A JP15036778A JP15036778A JPS5575235A JP S5575235 A JPS5575235 A JP S5575235A JP 15036778 A JP15036778 A JP 15036778A JP 15036778 A JP15036778 A JP 15036778A JP S5575235 A JPS5575235 A JP S5575235A
- Authority
- JP
- Japan
- Prior art keywords
- film
- collector regions
- facing
- regions
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15036778A JPS5575235A (en) | 1978-12-04 | 1978-12-04 | Method of fabricating semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15036778A JPS5575235A (en) | 1978-12-04 | 1978-12-04 | Method of fabricating semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5575235A true JPS5575235A (en) | 1980-06-06 |
Family
ID=15495436
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15036778A Pending JPS5575235A (en) | 1978-12-04 | 1978-12-04 | Method of fabricating semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5575235A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5047359A (en) * | 1985-12-17 | 1991-09-10 | Mitsubishi Denki Kabushiki Kaisha | Method of implanting into the sidewall of a trench by rotating the wafer |
US5330926A (en) * | 1990-11-14 | 1994-07-19 | Nec Corporation | Method of fabricating semiconductor device having a trenched cell capacitor |
-
1978
- 1978-12-04 JP JP15036778A patent/JPS5575235A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5047359A (en) * | 1985-12-17 | 1991-09-10 | Mitsubishi Denki Kabushiki Kaisha | Method of implanting into the sidewall of a trench by rotating the wafer |
US5330926A (en) * | 1990-11-14 | 1994-07-19 | Nec Corporation | Method of fabricating semiconductor device having a trenched cell capacitor |
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