JPS556829A - Electron beam exposure method - Google Patents
Electron beam exposure methodInfo
- Publication number
- JPS556829A JPS556829A JP7892878A JP7892878A JPS556829A JP S556829 A JPS556829 A JP S556829A JP 7892878 A JP7892878 A JP 7892878A JP 7892878 A JP7892878 A JP 7892878A JP S556829 A JPS556829 A JP S556829A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- slit
- converter
- passing
- results
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE:To ensure stable exposure constantly through control of the electron beam according to the results of the measurement thereof with the second slit when it passing through the first slit. CONSTITUTION:Electron beam emitted from the electron gun 1 is received by the second rectangular slit 5 after passing through the first rectangular slit 3 and a deflector 4. Current developed here is sent to a central processing unit 11 through a preamplifier 9 and an A-D converter 10, where it is compared with the preset value of the electron beam. The results are fedback to a heater transformer 7 through a D- A converter 81 to control the heater current. An alignment coil 2 corrects the electron beam if any abnormalty is found in the current density distribution, thereby dissolving the horizontal drift associated with the aging of the cathode section.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7892878A JPS556829A (en) | 1978-06-29 | 1978-06-29 | Electron beam exposure method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7892878A JPS556829A (en) | 1978-06-29 | 1978-06-29 | Electron beam exposure method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS556829A true JPS556829A (en) | 1980-01-18 |
Family
ID=13675522
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7892878A Pending JPS556829A (en) | 1978-06-29 | 1978-06-29 | Electron beam exposure method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS556829A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56133825A (en) * | 1980-03-21 | 1981-10-20 | Toshiba Corp | Electron beam device |
JPS57207339A (en) * | 1981-06-16 | 1982-12-20 | Fujitsu Ltd | Electron beam exposure device |
JPS5856418A (en) * | 1981-09-30 | 1983-04-04 | Fujitsu Ltd | Electron beam exposure apparatus |
JPS6354581A (en) * | 1986-08-21 | 1988-03-08 | 金子農機株式会社 | Cereal drier |
JP2009010078A (en) * | 2007-06-27 | 2009-01-15 | Nuflare Technology Inc | Electron beam drawing device and current density adjustment method for electron beam |
-
1978
- 1978-06-29 JP JP7892878A patent/JPS556829A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56133825A (en) * | 1980-03-21 | 1981-10-20 | Toshiba Corp | Electron beam device |
JPH0450732B2 (en) * | 1980-03-21 | 1992-08-17 | Tokyo Shibaura Electric Co | |
JPS57207339A (en) * | 1981-06-16 | 1982-12-20 | Fujitsu Ltd | Electron beam exposure device |
JPS5856418A (en) * | 1981-09-30 | 1983-04-04 | Fujitsu Ltd | Electron beam exposure apparatus |
JPS6354581A (en) * | 1986-08-21 | 1988-03-08 | 金子農機株式会社 | Cereal drier |
JPH0527024B2 (en) * | 1986-08-21 | 1993-04-19 | Kaneko Agricult Machinery | |
JP2009010078A (en) * | 2007-06-27 | 2009-01-15 | Nuflare Technology Inc | Electron beam drawing device and current density adjustment method for electron beam |
JP4676461B2 (en) * | 2007-06-27 | 2011-04-27 | 株式会社ニューフレアテクノロジー | Electron beam drawing apparatus and electron beam current density adjusting method |
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