JPS57207339A - Electron beam exposure device - Google Patents

Electron beam exposure device

Info

Publication number
JPS57207339A
JPS57207339A JP9340381A JP9340381A JPS57207339A JP S57207339 A JPS57207339 A JP S57207339A JP 9340381 A JP9340381 A JP 9340381A JP 9340381 A JP9340381 A JP 9340381A JP S57207339 A JPS57207339 A JP S57207339A
Authority
JP
Japan
Prior art keywords
voltage
electron beam
bias
brightness
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9340381A
Other languages
Japanese (ja)
Inventor
Masaki Yamabe
Yasuo Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9340381A priority Critical patent/JPS57207339A/en
Publication of JPS57207339A publication Critical patent/JPS57207339A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To make constant the brightness of irradiation electron beam, by converting voltage or signal obtained from a sample into voltage to compare with reference voltage to impress the bias voltage corresponding to the difference. CONSTITUTION:Sample current is detected by a Faraday cup 10' on a sample base being converted 16 into voltage to compare 17 with the reference voltage 8. When the both a bias resistor 20 as the meter for voltage potential and a servo motor rotating by rotation angles correlated with difference input 17 provided on the side of a control circuit 19 are coupled by a shaft, the bias resistance is varied with the difference input 17 for the automatic control of bias voltage. This constitution can compensate the variation of electron beam brightness accompanied with time lapse variation of an electron gun to obtain constant brightness.
JP9340381A 1981-06-16 1981-06-16 Electron beam exposure device Pending JPS57207339A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9340381A JPS57207339A (en) 1981-06-16 1981-06-16 Electron beam exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9340381A JPS57207339A (en) 1981-06-16 1981-06-16 Electron beam exposure device

Publications (1)

Publication Number Publication Date
JPS57207339A true JPS57207339A (en) 1982-12-20

Family

ID=14081327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9340381A Pending JPS57207339A (en) 1981-06-16 1981-06-16 Electron beam exposure device

Country Status (1)

Country Link
JP (1) JPS57207339A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6197914A (en) * 1984-10-19 1986-05-16 Hitachi Ltd Charged particle beam lithography equipment

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5140982A (en) * 1974-10-02 1976-04-06 Nippon Electron Optics Lab Denshipuroobusochi niokeru biimuanteikasochi
JPS556829A (en) * 1978-06-29 1980-01-18 Fujitsu Ltd Electron beam exposure method
JPS5622655A (en) * 1979-08-03 1981-03-03 Nippon Telegr & Teleph Corp <Ntt> Glass material for optical glass fiber
JPS57201021A (en) * 1981-06-05 1982-12-09 Hitachi Ltd Electron ray drawing apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5140982A (en) * 1974-10-02 1976-04-06 Nippon Electron Optics Lab Denshipuroobusochi niokeru biimuanteikasochi
JPS556829A (en) * 1978-06-29 1980-01-18 Fujitsu Ltd Electron beam exposure method
JPS5622655A (en) * 1979-08-03 1981-03-03 Nippon Telegr & Teleph Corp <Ntt> Glass material for optical glass fiber
JPS57201021A (en) * 1981-06-05 1982-12-09 Hitachi Ltd Electron ray drawing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6197914A (en) * 1984-10-19 1986-05-16 Hitachi Ltd Charged particle beam lithography equipment

Similar Documents

Publication Publication Date Title
JPS57111421A (en) Measuring device of multielement sensor
AU5094185A (en) Flow measuring apparatus with analog, essentially linear output
JPS567061A (en) Detector for output voltage drop of stabilizing dc power
JPS57207339A (en) Electron beam exposure device
JPS5730414A (en) Offset automatic compensating system
JPS54114173A (en) Electronic probe device
JPS553089A (en) Driving method of proportional controller
JPS5638755A (en) Sample location displaying device
JPS5688142A (en) Image density control device
JPS57117002A (en) Automatic setting circuit
EP0108440A1 (en) A measuring device for measuring the optical density of both the background and the image areas of an original
ATE597T1 (en) METHOD OF CORRECTING THE SENSITIVITY OF THE WEIGHING DEVICE OF ELECTRICAL WEIGHING EQUIPMENT AND CIRCUIT ARRANGEMENT FOR PERFORMING THE METHOD.
JPS5693339A (en) Function test device of integrated circuit
JPS6455375A (en) Device for projecting ion beam
JPS57162886A (en) Automatic beam quantity control circuit
JPS567429A (en) Patterning device
JPS57135373A (en) Power supply device for measuring electric power apparatus
JPS535715A (en) Control de vice for energizing electric generator
Harley Recording the load angle of a synchronous machine
JPS54102978A (en) Test method for semiconductor element
JPS57161556A (en) Voltage measuring device using electron beam
JPS5732127A (en) Comparator circuit
JPS56132758A (en) Mass spectrometer
JPS5648135A (en) Painting for electron beam and device therefor
JPS52103726A (en) Burner controller