JPS5550627A - Mask for lithography - Google Patents
Mask for lithographyInfo
- Publication number
- JPS5550627A JPS5550627A JP12487778A JP12487778A JPS5550627A JP S5550627 A JPS5550627 A JP S5550627A JP 12487778 A JP12487778 A JP 12487778A JP 12487778 A JP12487778 A JP 12487778A JP S5550627 A JPS5550627 A JP S5550627A
- Authority
- JP
- Japan
- Prior art keywords
- film
- mask
- attached
- transparent
- cotton
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To increase the endurance of a mask by making a bright-and-dark pattern on a transparent substrate and stacking thin conductive transparent films thereon.
CONSTITUTION: A bright-and-dark pattern material 2 such as Cr and the like is selected and attached to glass 1, and a transparent conductive film 3 is attached. The film 3 is made by attaching In2O3 and SnO3 on the Teflon surface and covering the back surface by a transparent bonding material. This mask does not give intensive effects on the photosensitive pattern of the photosensitive film on the substrate even though scratches are made on the film 3 on the surface. Cotton flues are not attached statically when dirt such as finger prints on the film 3 is wiped out by cotton. Therefore, the mask can be used for a long time.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12487778A JPS5550627A (en) | 1978-10-09 | 1978-10-09 | Mask for lithography |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12487778A JPS5550627A (en) | 1978-10-09 | 1978-10-09 | Mask for lithography |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5550627A true JPS5550627A (en) | 1980-04-12 |
Family
ID=14896295
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12487778A Pending JPS5550627A (en) | 1978-10-09 | 1978-10-09 | Mask for lithography |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5550627A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59115683A (en) * | 1982-12-22 | 1984-07-04 | Canon Inc | Picture signal processor |
US6300042B1 (en) | 1998-11-24 | 2001-10-09 | Motorola, Inc. | Lithographic printing method using a low surface energy layer |
US6550889B2 (en) | 2000-09-26 | 2003-04-22 | Imaje S.A. | Process and device for cleaning the nozzles of inkjet printers, and print head and printer incorporating such a device |
-
1978
- 1978-10-09 JP JP12487778A patent/JPS5550627A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59115683A (en) * | 1982-12-22 | 1984-07-04 | Canon Inc | Picture signal processor |
JPH0462233B2 (en) * | 1982-12-22 | 1992-10-05 | Canon Kk | |
US6300042B1 (en) | 1998-11-24 | 2001-10-09 | Motorola, Inc. | Lithographic printing method using a low surface energy layer |
US6562553B2 (en) | 1998-11-24 | 2003-05-13 | Motorola, Inc. | Lithographic printing method using a low surface energy layer |
US6550889B2 (en) | 2000-09-26 | 2003-04-22 | Imaje S.A. | Process and device for cleaning the nozzles of inkjet printers, and print head and printer incorporating such a device |
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