JPS5550627A - Mask for lithography - Google Patents

Mask for lithography

Info

Publication number
JPS5550627A
JPS5550627A JP12487778A JP12487778A JPS5550627A JP S5550627 A JPS5550627 A JP S5550627A JP 12487778 A JP12487778 A JP 12487778A JP 12487778 A JP12487778 A JP 12487778A JP S5550627 A JPS5550627 A JP S5550627A
Authority
JP
Japan
Prior art keywords
film
mask
attached
transparent
cotton
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12487778A
Other languages
Japanese (ja)
Inventor
Yoshiyuki Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP12487778A priority Critical patent/JPS5550627A/en
Publication of JPS5550627A publication Critical patent/JPS5550627A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To increase the endurance of a mask by making a bright-and-dark pattern on a transparent substrate and stacking thin conductive transparent films thereon.
CONSTITUTION: A bright-and-dark pattern material 2 such as Cr and the like is selected and attached to glass 1, and a transparent conductive film 3 is attached. The film 3 is made by attaching In2O3 and SnO3 on the Teflon surface and covering the back surface by a transparent bonding material. This mask does not give intensive effects on the photosensitive pattern of the photosensitive film on the substrate even though scratches are made on the film 3 on the surface. Cotton flues are not attached statically when dirt such as finger prints on the film 3 is wiped out by cotton. Therefore, the mask can be used for a long time.
COPYRIGHT: (C)1980,JPO&Japio
JP12487778A 1978-10-09 1978-10-09 Mask for lithography Pending JPS5550627A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12487778A JPS5550627A (en) 1978-10-09 1978-10-09 Mask for lithography

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12487778A JPS5550627A (en) 1978-10-09 1978-10-09 Mask for lithography

Publications (1)

Publication Number Publication Date
JPS5550627A true JPS5550627A (en) 1980-04-12

Family

ID=14896295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12487778A Pending JPS5550627A (en) 1978-10-09 1978-10-09 Mask for lithography

Country Status (1)

Country Link
JP (1) JPS5550627A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59115683A (en) * 1982-12-22 1984-07-04 Canon Inc Picture signal processor
US6300042B1 (en) 1998-11-24 2001-10-09 Motorola, Inc. Lithographic printing method using a low surface energy layer
US6550889B2 (en) 2000-09-26 2003-04-22 Imaje S.A. Process and device for cleaning the nozzles of inkjet printers, and print head and printer incorporating such a device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59115683A (en) * 1982-12-22 1984-07-04 Canon Inc Picture signal processor
JPH0462233B2 (en) * 1982-12-22 1992-10-05 Canon Kk
US6300042B1 (en) 1998-11-24 2001-10-09 Motorola, Inc. Lithographic printing method using a low surface energy layer
US6562553B2 (en) 1998-11-24 2003-05-13 Motorola, Inc. Lithographic printing method using a low surface energy layer
US6550889B2 (en) 2000-09-26 2003-04-22 Imaje S.A. Process and device for cleaning the nozzles of inkjet printers, and print head and printer incorporating such a device

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