JPS5360177A - Photo mask - Google Patents

Photo mask

Info

Publication number
JPS5360177A
JPS5360177A JP13578176A JP13578176A JPS5360177A JP S5360177 A JPS5360177 A JP S5360177A JP 13578176 A JP13578176 A JP 13578176A JP 13578176 A JP13578176 A JP 13578176A JP S5360177 A JPS5360177 A JP S5360177A
Authority
JP
Japan
Prior art keywords
photo mask
quartz
glass
transfer
providing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13578176A
Other languages
Japanese (ja)
Inventor
Kazushi Nagata
Kazuto Suehiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13578176A priority Critical patent/JPS5360177A/en
Publication of JPS5360177A publication Critical patent/JPS5360177A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE: To reduce the dimensional shift at the time of transfer by providing an antireflection film on the substrate surface of quartz or glass.
COPYRIGHT: (C)1978,JPO&Japio
JP13578176A 1976-11-10 1976-11-10 Photo mask Pending JPS5360177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13578176A JPS5360177A (en) 1976-11-10 1976-11-10 Photo mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13578176A JPS5360177A (en) 1976-11-10 1976-11-10 Photo mask

Publications (1)

Publication Number Publication Date
JPS5360177A true JPS5360177A (en) 1978-05-30

Family

ID=15159692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13578176A Pending JPS5360177A (en) 1976-11-10 1976-11-10 Photo mask

Country Status (1)

Country Link
JP (1) JPS5360177A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6229139A (en) * 1985-07-31 1987-02-07 Hitachi Ltd Pattern transfer mask and application thereof
JPS63204259A (en) * 1987-02-20 1988-08-23 Hitachi Ltd Mask
JPH02195354A (en) * 1989-01-24 1990-08-01 Hoya Corp Photomask

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6229139A (en) * 1985-07-31 1987-02-07 Hitachi Ltd Pattern transfer mask and application thereof
JPS63204259A (en) * 1987-02-20 1988-08-23 Hitachi Ltd Mask
JPH02195354A (en) * 1989-01-24 1990-08-01 Hoya Corp Photomask

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