JPS554937A - Dry etching method - Google Patents
Dry etching methodInfo
- Publication number
- JPS554937A JPS554937A JP7698678A JP7698678A JPS554937A JP S554937 A JPS554937 A JP S554937A JP 7698678 A JP7698678 A JP 7698678A JP 7698678 A JP7698678 A JP 7698678A JP S554937 A JPS554937 A JP S554937A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- etched
- parts
- covering
- impinged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7698678A JPS554937A (en) | 1978-06-27 | 1978-06-27 | Dry etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7698678A JPS554937A (en) | 1978-06-27 | 1978-06-27 | Dry etching method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS554937A true JPS554937A (en) | 1980-01-14 |
JPS6350854B2 JPS6350854B2 (ja) | 1988-10-12 |
Family
ID=13621090
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7698678A Granted JPS554937A (en) | 1978-06-27 | 1978-06-27 | Dry etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS554937A (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4341616A (en) * | 1980-01-25 | 1982-07-27 | Mitsubishi Denki Kabushiki Kaisha | Dry etching device |
JPS6084762U (ja) * | 1983-11-15 | 1985-06-11 | 愛三工業株式会社 | 内燃機関用混合気供給装置 |
JPS62279626A (ja) * | 1986-05-27 | 1987-12-04 | M Setetsuku Kk | 半導体用基板に対する不純物のド−ピング方法 |
JPH04229619A (ja) * | 1990-05-21 | 1992-08-19 | Applied Materials Inc | 化学的腐食から保護する作用をなす導電性コーティングをチャンバの内側金属面上に有するプラズマエッチング装置と、それを形成する方法 |
US8850715B2 (en) * | 2006-09-07 | 2014-10-07 | Eisenmann Ag | Process and installation for drying articles |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52130288A (en) * | 1976-04-26 | 1977-11-01 | Hitachi Ltd | Patterning method |
-
1978
- 1978-06-27 JP JP7698678A patent/JPS554937A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52130288A (en) * | 1976-04-26 | 1977-11-01 | Hitachi Ltd | Patterning method |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4341616A (en) * | 1980-01-25 | 1982-07-27 | Mitsubishi Denki Kabushiki Kaisha | Dry etching device |
JPS6084762U (ja) * | 1983-11-15 | 1985-06-11 | 愛三工業株式会社 | 内燃機関用混合気供給装置 |
JPS62279626A (ja) * | 1986-05-27 | 1987-12-04 | M Setetsuku Kk | 半導体用基板に対する不純物のド−ピング方法 |
JPH0516656B2 (ja) * | 1986-05-27 | 1993-03-05 | Emu Setetsuku Kk | |
JPH04229619A (ja) * | 1990-05-21 | 1992-08-19 | Applied Materials Inc | 化学的腐食から保護する作用をなす導電性コーティングをチャンバの内側金属面上に有するプラズマエッチング装置と、それを形成する方法 |
US8850715B2 (en) * | 2006-09-07 | 2014-10-07 | Eisenmann Ag | Process and installation for drying articles |
Also Published As
Publication number | Publication date |
---|---|
JPS6350854B2 (ja) | 1988-10-12 |
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