JPS5538566A - Orientation method of liquid crystal cell substrate - Google Patents

Abstract

PURPOSE: To obtain liquid crystal cells of uniform quality in multiple and simultaneous processing in mass production process, by forming oriented layers by vapor deposition at vapor deposition angles being not constant but distributed in a proper range.

CONSTITUTION: Plural substrate 63 are supported on a rotating body 72 which rotates about a rotary shaft 61, with the side to form oriented layer directed to the outside. Vapor flow 66 created in a vapor source 64 enters the substrates 63 at angles distributed in angle range difined by a mask member 67 to form oriented layers. The range of vapor deposition angles is defined by the size and position of the hole 68 provided in the member 67. Namely, the end part 69a of the hole 68 corresponds to vapor deposition angle α₁, and the end part 69b to vapor deposition angle α₂. When evaporating, the rotating body 62 continuously rotates, and all the substrates 63 are set in the same vapor deposition conditions, and vapor deposition is performed at each point of all substrates 63 at the vapor deposition angle α continuously distributing in the defined range, i.e., α₁≥α≥α₂.

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