JPS55162339A - Plasma treating device - Google Patents
Plasma treating deviceInfo
- Publication number
- JPS55162339A JPS55162339A JP7153279A JP7153279A JPS55162339A JP S55162339 A JPS55162339 A JP S55162339A JP 7153279 A JP7153279 A JP 7153279A JP 7153279 A JP7153279 A JP 7153279A JP S55162339 A JPS55162339 A JP S55162339A
- Authority
- JP
- Japan
- Prior art keywords
- diameters
- semiconductor wafers
- whose
- substrates
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Drying Of Semiconductors (AREA)
- Plasma Technology (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54071532A JPS5845891B2 (ja) | 1979-06-07 | 1979-06-07 | プラズマ処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54071532A JPS5845891B2 (ja) | 1979-06-07 | 1979-06-07 | プラズマ処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55162339A true JPS55162339A (en) | 1980-12-17 |
JPS5845891B2 JPS5845891B2 (ja) | 1983-10-13 |
Family
ID=13463433
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP54071532A Expired JPS5845891B2 (ja) | 1979-06-07 | 1979-06-07 | プラズマ処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5845891B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57147279A (en) * | 1981-03-09 | 1982-09-11 | Stanley Electric Co Ltd | Field effect transistor using amorphous silicon and manufacture of insulating film for the same transistor |
-
1979
- 1979-06-07 JP JP54071532A patent/JPS5845891B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57147279A (en) * | 1981-03-09 | 1982-09-11 | Stanley Electric Co Ltd | Field effect transistor using amorphous silicon and manufacture of insulating film for the same transistor |
Also Published As
Publication number | Publication date |
---|---|
JPS5845891B2 (ja) | 1983-10-13 |
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