JPS6428810A - Device for forming film - Google Patents

Device for forming film

Info

Publication number
JPS6428810A
JPS6428810A JP18232987A JP18232987A JPS6428810A JP S6428810 A JPS6428810 A JP S6428810A JP 18232987 A JP18232987 A JP 18232987A JP 18232987 A JP18232987 A JP 18232987A JP S6428810 A JPS6428810 A JP S6428810A
Authority
JP
Japan
Prior art keywords
substrate
film
electrode
frequency application
application electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18232987A
Other languages
Japanese (ja)
Other versions
JP2667665B2 (en
Inventor
Koji Igarashi
Nobuhiro Fukuda
Masato Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP62182329A priority Critical patent/JP2667665B2/en
Publication of JPS6428810A publication Critical patent/JPS6428810A/en
Application granted granted Critical
Publication of JP2667665B2 publication Critical patent/JP2667665B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29B—PREPARATION OR PRETREATMENT OF THE MATERIAL TO BE SHAPED; MAKING GRANULES OR PREFORMS; RECOVERY OF PLASTICS OR OTHER CONSTITUENTS OF WASTE MATERIAL CONTAINING PLASTICS
    • B29B9/00—Making granules
    • B29B9/02—Making granules by dividing preformed material
    • B29B9/06—Making granules by dividing preformed material in the form of filamentary material, e.g. combined with extrusion

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To make it possible to form a film on a substrate with a large area at a high film-formation speed by a method wherein, in an in-line film-formation device in which a thin film is continuously formed, a high-frequency application electrode having a specific narrow width is used. CONSTITUTION:A thin film is continuously formed on a substrate by allowing the substrate, retained by a substrate retaining jig 5, to proceed in the glow discharge generated between a high-frequency application electrode 1 and an earthing electrode 2. At that time, the length (L) of the high-frequency application electrode in the proceeding direction of the substrate is made shorter than the length (l) in the proceeding direction of the retaining jig 5, and the electrode is formed in the narrow width in the range of 0.5-10cm. As a result, a homogenous film can be formed at high speed on the substrate having a large area.
JP62182329A 1987-07-23 1987-07-23 Film forming equipment Expired - Fee Related JP2667665B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62182329A JP2667665B2 (en) 1987-07-23 1987-07-23 Film forming equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62182329A JP2667665B2 (en) 1987-07-23 1987-07-23 Film forming equipment

Publications (2)

Publication Number Publication Date
JPS6428810A true JPS6428810A (en) 1989-01-31
JP2667665B2 JP2667665B2 (en) 1997-10-27

Family

ID=16116403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62182329A Expired - Fee Related JP2667665B2 (en) 1987-07-23 1987-07-23 Film forming equipment

Country Status (1)

Country Link
JP (1) JP2667665B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6936310B1 (en) 1999-04-02 2005-08-30 Sharp Kabushiki Kaisha Plasma processing method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS565972A (en) * 1979-06-27 1981-01-22 Canon Inc Film forming method
JPS62208623A (en) * 1986-03-03 1987-09-12 Mitsubishi Electric Corp Semiconductor device manufacture apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS565972A (en) * 1979-06-27 1981-01-22 Canon Inc Film forming method
JPS62208623A (en) * 1986-03-03 1987-09-12 Mitsubishi Electric Corp Semiconductor device manufacture apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6936310B1 (en) 1999-04-02 2005-08-30 Sharp Kabushiki Kaisha Plasma processing method

Also Published As

Publication number Publication date
JP2667665B2 (en) 1997-10-27

Similar Documents

Publication Publication Date Title
JPS5267295A (en) Driving method of electron optical display body
JPS5419662A (en) Forming method of plasma cvd film
JPS5676337A (en) Wire cut discharge type machining device
ES8704666A1 (en) Process and device for producing a plasma arc.
JPS6428810A (en) Device for forming film
JPS5440079A (en) Plasma etching method
JPS648184A (en) Applying of elastic band onto shifting web and device therefor
JPS5558371A (en) Sputtering apparatus
JPS5424249A (en) Scarfing method by plasma wide arc for matallic material
JPS5660021A (en) Etching for semiconductor device
JPS52127770A (en) Spatter etching method
JPS51121651A (en) Screw and its manufacturing method
JPS5329346A (en) Process of electrodeposition
JPS5291397A (en) Electrode forming method for photo electrical dispaly unit
JPS5315206A (en) Turning over apparatus for steel pieces
JPS5733438A (en) Vanishing method of magnetic disk
JPS5491092A (en) Piezoelectric vibrator
JPS51133895A (en) Laser machining
JPS5232295A (en) Laser excitation power supply
JPS55162339A (en) Plasma treating device
JPS5255456A (en) Manufacture of solid circuit containing minute groove
JPS5667925A (en) Plasma etching method
JPS5681922A (en) Manufacture of thin film
JPS57192097A (en) Formation of metal film
JPS529760A (en) Screw with strengthened neck against deformation

Legal Events

Date Code Title Description
S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees