JPS55104478A - Metallizing apparatus - Google Patents

Metallizing apparatus

Info

Publication number
JPS55104478A
JPS55104478A JP868179A JP868179A JPS55104478A JP S55104478 A JPS55104478 A JP S55104478A JP 868179 A JP868179 A JP 868179A JP 868179 A JP868179 A JP 868179A JP S55104478 A JPS55104478 A JP S55104478A
Authority
JP
Japan
Prior art keywords
sample
metallizing
electron rays
heat
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP868179A
Other languages
Japanese (ja)
Inventor
Teruo Hashimoto
Sanpei Ezaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Nippon Chemical Industrial Co Ltd
Original Assignee
Nippon Chemical Industrial Co Ltd
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemical Industrial Co Ltd, Nippon Kogaku KK filed Critical Nippon Chemical Industrial Co Ltd
Priority to JP868179A priority Critical patent/JPS55104478A/en
Publication of JPS55104478A publication Critical patent/JPS55104478A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

PURPOSE:To omit a preliminary heating process for degassing the metallizing apparatus, by irradiating electron rays on a continuous belt-shaped metallizing sample in turn in the direction of the belt so as to heat and evaporate the sample. CONSTITUTION:A vacuum tank is maintained at a high vacuum, and a metallizing portion 10a of a metallizing sample 10 of annular belt shape is preliminarily heated to release the impurity gas contained in the sample 10. Then electron rays 14 are irradiated on the portion 10a in order to heat, melt, and evaporate the sample of the portion to form a film adhered to the surface of a substrate which is arranged in the vacuum tank. While the portion 10a is melted and evaporated during the first metallizing, the sample in the adjacent region 10b shown by a dotted line is also heated by heat conduction so as to release gas. Subsequently, a sample-supporting stand 11 is turned through an angle theta, and the second melting and evaporation is conducted by irradiation of electron rays 14 on the intended region 10c within the region 10b. Hereby the second and the following metallizing are conducted by repeating these operations with the degassing steps omitted.
JP868179A 1979-01-30 1979-01-30 Metallizing apparatus Pending JPS55104478A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP868179A JPS55104478A (en) 1979-01-30 1979-01-30 Metallizing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP868179A JPS55104478A (en) 1979-01-30 1979-01-30 Metallizing apparatus

Publications (1)

Publication Number Publication Date
JPS55104478A true JPS55104478A (en) 1980-08-09

Family

ID=11699659

Family Applications (1)

Application Number Title Priority Date Filing Date
JP868179A Pending JPS55104478A (en) 1979-01-30 1979-01-30 Metallizing apparatus

Country Status (1)

Country Link
JP (1) JPS55104478A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60238483A (en) * 1984-05-14 1985-11-27 Sumitomo Electric Ind Ltd Coated hard metal
JPS60238482A (en) * 1984-05-14 1985-11-27 Sumitomo Electric Ind Ltd Coated hard metal

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5051981A (en) * 1973-09-10 1975-05-09
JPS5114181A (en) * 1974-06-19 1976-02-04 Airco Inc KISHITSUNOHI FUKUHOHO

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5051981A (en) * 1973-09-10 1975-05-09
JPS5114181A (en) * 1974-06-19 1976-02-04 Airco Inc KISHITSUNOHI FUKUHOHO

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60238483A (en) * 1984-05-14 1985-11-27 Sumitomo Electric Ind Ltd Coated hard metal
JPS60238482A (en) * 1984-05-14 1985-11-27 Sumitomo Electric Ind Ltd Coated hard metal
JPS6248751B2 (en) * 1984-05-14 1987-10-15 Sumitomo Electric Industries
JPS6248750B2 (en) * 1984-05-14 1987-10-15 Sumitomo Electric Industries

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