JPS5469384A - Electric furnace unit - Google Patents
Electric furnace unitInfo
- Publication number
- JPS5469384A JPS5469384A JP13689677A JP13689677A JPS5469384A JP S5469384 A JPS5469384 A JP S5469384A JP 13689677 A JP13689677 A JP 13689677A JP 13689677 A JP13689677 A JP 13689677A JP S5469384 A JPS5469384 A JP S5469384A
- Authority
- JP
- Japan
- Prior art keywords
- jig
- wafer
- wafers
- gas
- electric furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Resistance Heating (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13689677A JPS5469384A (en) | 1977-11-14 | 1977-11-14 | Electric furnace unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13689677A JPS5469384A (en) | 1977-11-14 | 1977-11-14 | Electric furnace unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5469384A true JPS5469384A (en) | 1979-06-04 |
Family
ID=15186082
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13689677A Pending JPS5469384A (en) | 1977-11-14 | 1977-11-14 | Electric furnace unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5469384A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5885523A (en) * | 1981-11-17 | 1983-05-21 | Nec Home Electronics Ltd | Semiconductor manufacturing apparatus |
JPS59152618A (en) * | 1983-02-21 | 1984-08-31 | Hitachi Ltd | Thermal treatment and equipment for the same |
JPS59215718A (en) * | 1983-05-23 | 1984-12-05 | Kokusai Electric Co Ltd | Infrared heat treatment apparatus for semiconductor wafer |
JPS60110114A (en) * | 1983-11-21 | 1985-06-15 | Kokusai Electric Co Ltd | Apparatus for heat treating semiconductor substrate with infrared rays |
-
1977
- 1977-11-14 JP JP13689677A patent/JPS5469384A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5885523A (en) * | 1981-11-17 | 1983-05-21 | Nec Home Electronics Ltd | Semiconductor manufacturing apparatus |
JPH0151051B2 (en) * | 1981-11-17 | 1989-11-01 | Nippon Denki Hoomu Erekutoronikusu Kk | |
JPS59152618A (en) * | 1983-02-21 | 1984-08-31 | Hitachi Ltd | Thermal treatment and equipment for the same |
JPS59215718A (en) * | 1983-05-23 | 1984-12-05 | Kokusai Electric Co Ltd | Infrared heat treatment apparatus for semiconductor wafer |
JPS60110114A (en) * | 1983-11-21 | 1985-06-15 | Kokusai Electric Co Ltd | Apparatus for heat treating semiconductor substrate with infrared rays |
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Legal Events
Date | Code | Title | Description |
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