JPS545386A - Surface processor for wafer - Google Patents

Surface processor for wafer

Info

Publication number
JPS545386A
JPS545386A JP6983277A JP6983277A JPS545386A JP S545386 A JPS545386 A JP S545386A JP 6983277 A JP6983277 A JP 6983277A JP 6983277 A JP6983277 A JP 6983277A JP S545386 A JPS545386 A JP S545386A
Authority
JP
Japan
Prior art keywords
wafer
surface processor
substrate
processor
supplying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6983277A
Other languages
Japanese (ja)
Inventor
Hideo Meguro
Akihiro Tomosawa
Makoto Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6983277A priority Critical patent/JPS545386A/en
Publication of JPS545386A publication Critical patent/JPS545386A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To ensure a high-uniformity surface processing by holding the substrate almost on the same plane and then supplying the reaction gas from both surfaces of the substrate.
COPYRIGHT: (C)1979,JPO&Japio
JP6983277A 1977-06-15 1977-06-15 Surface processor for wafer Pending JPS545386A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6983277A JPS545386A (en) 1977-06-15 1977-06-15 Surface processor for wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6983277A JPS545386A (en) 1977-06-15 1977-06-15 Surface processor for wafer

Publications (1)

Publication Number Publication Date
JPS545386A true JPS545386A (en) 1979-01-16

Family

ID=13414136

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6983277A Pending JPS545386A (en) 1977-06-15 1977-06-15 Surface processor for wafer

Country Status (1)

Country Link
JP (1) JPS545386A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59122719A (en) * 1982-12-28 1984-07-16 Nagatoshi Suzuki Remover for exhaust gas from engine
JPS61168923A (en) * 1985-01-17 1986-07-30 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Even gas flow generator

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59122719A (en) * 1982-12-28 1984-07-16 Nagatoshi Suzuki Remover for exhaust gas from engine
JPS61168923A (en) * 1985-01-17 1986-07-30 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Even gas flow generator
JPH0439223B2 (en) * 1985-01-17 1992-06-26

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