JPS5461477A - Method of machining by electron beam or ion beam irradiation - Google Patents
Method of machining by electron beam or ion beam irradiationInfo
- Publication number
- JPS5461477A JPS5461477A JP12754377A JP12754377A JPS5461477A JP S5461477 A JPS5461477 A JP S5461477A JP 12754377 A JP12754377 A JP 12754377A JP 12754377 A JP12754377 A JP 12754377A JP S5461477 A JPS5461477 A JP S5461477A
- Authority
- JP
- Japan
- Prior art keywords
- machining
- electron beam
- ion beam
- beam irradiation
- irradiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12754377A JPS5461477A (en) | 1977-10-26 | 1977-10-26 | Method of machining by electron beam or ion beam irradiation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12754377A JPS5461477A (en) | 1977-10-26 | 1977-10-26 | Method of machining by electron beam or ion beam irradiation |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5461477A true JPS5461477A (en) | 1979-05-17 |
Family
ID=14962599
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12754377A Pending JPS5461477A (en) | 1977-10-26 | 1977-10-26 | Method of machining by electron beam or ion beam irradiation |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5461477A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5615045A (en) * | 1979-07-17 | 1981-02-13 | Mitsubishi Electric Corp | Formation of pattern |
JPS5650514A (en) * | 1979-10-01 | 1981-05-07 | Mitsubishi Electric Corp | Formation of fine pattern |
JPS5656636A (en) * | 1979-10-13 | 1981-05-18 | Mitsubishi Electric Corp | Processing method of fine pattern |
JPS5666038A (en) * | 1979-11-01 | 1981-06-04 | Mitsubishi Electric Corp | Formation of micro-pattern |
JPS5731142A (en) * | 1980-07-31 | 1982-02-19 | Fujitsu Ltd | Manufacture of semiconductor device |
JP2001105400A (en) * | 1998-12-25 | 2001-04-17 | Canon Inc | Method of manufacturing fine holes, fine holes manufactured thereby and structural body having the same |
-
1977
- 1977-10-26 JP JP12754377A patent/JPS5461477A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5615045A (en) * | 1979-07-17 | 1981-02-13 | Mitsubishi Electric Corp | Formation of pattern |
JPS5650514A (en) * | 1979-10-01 | 1981-05-07 | Mitsubishi Electric Corp | Formation of fine pattern |
JPS5656636A (en) * | 1979-10-13 | 1981-05-18 | Mitsubishi Electric Corp | Processing method of fine pattern |
JPH0122728B2 (en) * | 1979-10-13 | 1989-04-27 | Mitsubishi Electric Corp | |
JPS5666038A (en) * | 1979-11-01 | 1981-06-04 | Mitsubishi Electric Corp | Formation of micro-pattern |
JPS5731142A (en) * | 1980-07-31 | 1982-02-19 | Fujitsu Ltd | Manufacture of semiconductor device |
JP2001105400A (en) * | 1998-12-25 | 2001-04-17 | Canon Inc | Method of manufacturing fine holes, fine holes manufactured thereby and structural body having the same |
JP4532634B2 (en) * | 1998-12-25 | 2010-08-25 | キヤノン株式会社 | Method for producing pores |
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