JPS544084A - Manufacture for semiconductor integrated circuit - Google Patents

Manufacture for semiconductor integrated circuit

Info

Publication number
JPS544084A
JPS544084A JP6865977A JP6865977A JPS544084A JP S544084 A JPS544084 A JP S544084A JP 6865977 A JP6865977 A JP 6865977A JP 6865977 A JP6865977 A JP 6865977A JP S544084 A JPS544084 A JP S544084A
Authority
JP
Japan
Prior art keywords
manufacture
integrated circuit
semiconductor integrated
mes
depletion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6865977A
Other languages
Japanese (ja)
Inventor
Yoshinori Morita
Tsuneo Funatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6865977A priority Critical patent/JPS544084A/en
Publication of JPS544084A publication Critical patent/JPS544084A/en
Pending legal-status Critical Current

Links

Landscapes

  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: To easily manufacture MES-FET inverters of E (Enhancement)/D (Depletion) constitution, by satisfying the conditions of impurity concentration, thickness of active layer, and width of air layer with twice ion implantation.
COPYRIGHT: (C)1979,JPO&Japio
JP6865977A 1977-06-10 1977-06-10 Manufacture for semiconductor integrated circuit Pending JPS544084A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6865977A JPS544084A (en) 1977-06-10 1977-06-10 Manufacture for semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6865977A JPS544084A (en) 1977-06-10 1977-06-10 Manufacture for semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPS544084A true JPS544084A (en) 1979-01-12

Family

ID=13380042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6865977A Pending JPS544084A (en) 1977-06-10 1977-06-10 Manufacture for semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS544084A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57178375A (en) * 1981-04-27 1982-11-02 Sumitomo Electric Ind Ltd Semiconductor integrated circuit
JPS58139474A (en) * 1982-02-15 1983-08-18 Oki Electric Ind Co Ltd Manufacture of compound semiconductor device
JPS58122631U (en) * 1982-02-16 1983-08-20 株式会社クボタ Gear shift control device for agricultural tractors
JPS5944057U (en) * 1982-07-26 1984-03-23 スペリ・コ−ポレ−シヨン GaAs depletion mode device
US7872504B2 (en) 2008-11-10 2011-01-18 Samsung Electronics Co., Ltd. Inverter and logic device comprising the same

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57178375A (en) * 1981-04-27 1982-11-02 Sumitomo Electric Ind Ltd Semiconductor integrated circuit
JPS58139474A (en) * 1982-02-15 1983-08-18 Oki Electric Ind Co Ltd Manufacture of compound semiconductor device
JPS58122631U (en) * 1982-02-16 1983-08-20 株式会社クボタ Gear shift control device for agricultural tractors
JPS5944057U (en) * 1982-07-26 1984-03-23 スペリ・コ−ポレ−シヨン GaAs depletion mode device
US7872504B2 (en) 2008-11-10 2011-01-18 Samsung Electronics Co., Ltd. Inverter and logic device comprising the same
US8089301B2 (en) 2008-11-10 2012-01-03 Samsung Electronics Co., Ltd. Inverter and logic device comprising the same

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