JPS5418685A - Manufacture of field effect type semiconductor device - Google Patents
Manufacture of field effect type semiconductor deviceInfo
- Publication number
- JPS5418685A JPS5418685A JP8293377A JP8293377A JPS5418685A JP S5418685 A JPS5418685 A JP S5418685A JP 8293377 A JP8293377 A JP 8293377A JP 8293377 A JP8293377 A JP 8293377A JP S5418685 A JPS5418685 A JP S5418685A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- type semiconductor
- field effect
- effect type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To eliminate the crystalline defect as well as to reduce the noise by forming the source and drain regions on the semiconductor substrate with the electrode attached respectively and then injecting the impurity ion and H2 ion at part of the source and drain regions with an annealing process given.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8293377A JPS6044831B2 (en) | 1977-07-13 | 1977-07-13 | Method for manufacturing field effect semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8293377A JPS6044831B2 (en) | 1977-07-13 | 1977-07-13 | Method for manufacturing field effect semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5418685A true JPS5418685A (en) | 1979-02-10 |
JPS6044831B2 JPS6044831B2 (en) | 1985-10-05 |
Family
ID=13788022
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8293377A Expired JPS6044831B2 (en) | 1977-07-13 | 1977-07-13 | Method for manufacturing field effect semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6044831B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5884460A (en) * | 1981-11-13 | 1983-05-20 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
-
1977
- 1977-07-13 JP JP8293377A patent/JPS6044831B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5884460A (en) * | 1981-11-13 | 1983-05-20 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS6044831B2 (en) | 1985-10-05 |
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