JPS5421289A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS5421289A JPS5421289A JP8681077A JP8681077A JPS5421289A JP S5421289 A JPS5421289 A JP S5421289A JP 8681077 A JP8681077 A JP 8681077A JP 8681077 A JP8681077 A JP 8681077A JP S5421289 A JPS5421289 A JP S5421289A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- manufacture
- insulation film
- window
- openign
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8681077A JPS5421289A (en) | 1977-07-19 | 1977-07-19 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8681077A JPS5421289A (en) | 1977-07-19 | 1977-07-19 | Manufacture for semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5421289A true JPS5421289A (en) | 1979-02-17 |
JPS6155776B2 JPS6155776B2 (ja) | 1986-11-29 |
Family
ID=13897158
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8681077A Granted JPS5421289A (en) | 1977-07-19 | 1977-07-19 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5421289A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56142642A (en) * | 1980-04-07 | 1981-11-07 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS59141232A (ja) * | 1983-02-02 | 1984-08-13 | Seiko Instr & Electronics Ltd | 半導体装置の製造方法 |
-
1977
- 1977-07-19 JP JP8681077A patent/JPS5421289A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56142642A (en) * | 1980-04-07 | 1981-11-07 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS59141232A (ja) * | 1983-02-02 | 1984-08-13 | Seiko Instr & Electronics Ltd | 半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6155776B2 (ja) | 1986-11-29 |
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