JPS5386577A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5386577A JPS5386577A JP80777A JP80777A JPS5386577A JP S5386577 A JPS5386577 A JP S5386577A JP 80777 A JP80777 A JP 80777A JP 80777 A JP80777 A JP 80777A JP S5386577 A JPS5386577 A JP S5386577A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- parts
- extching
- faciliate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To faciliate etching of unnecessary glass parts and lower production cost by exposing the SiO2 of opening parts to oxygen plasma before extching the same.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP80777A JPS6054776B2 (en) | 1977-01-10 | 1977-01-10 | Manufacturing method for semiconductor devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP80777A JPS6054776B2 (en) | 1977-01-10 | 1977-01-10 | Manufacturing method for semiconductor devices |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5386577A true JPS5386577A (en) | 1978-07-31 |
JPS6054776B2 JPS6054776B2 (en) | 1985-12-02 |
Family
ID=11483942
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP80777A Expired JPS6054776B2 (en) | 1977-01-10 | 1977-01-10 | Manufacturing method for semiconductor devices |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6054776B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6410248A (en) * | 1987-07-03 | 1989-01-13 | Fuji Xerox Co Ltd | Method for removing resist in chrome photolithoetching |
-
1977
- 1977-01-10 JP JP80777A patent/JPS6054776B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6410248A (en) * | 1987-07-03 | 1989-01-13 | Fuji Xerox Co Ltd | Method for removing resist in chrome photolithoetching |
Also Published As
Publication number | Publication date |
---|---|
JPS6054776B2 (en) | 1985-12-02 |
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