JPS5380175A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5380175A JPS5380175A JP15676876A JP15676876A JPS5380175A JP S5380175 A JPS5380175 A JP S5380175A JP 15676876 A JP15676876 A JP 15676876A JP 15676876 A JP15676876 A JP 15676876A JP S5380175 A JPS5380175 A JP S5380175A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- manufacture
- semiconductor device
- isolation region
- breakage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bipolar Transistors (AREA)
- Element Separation (AREA)
Abstract
PURPOSE: To eliminate the abnormal diffusion of the base region as well as the wiring breakage, by providing a poly crystal Si layer which preventes the breakage of the isolation region when etching the insulator layer at the later process onto the semiconductor substrate containing the insulation/isolation region and finally by utilizing the Si layer after converting into an insulator layer.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15676876A JPS5380175A (en) | 1976-12-25 | 1976-12-25 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15676876A JPS5380175A (en) | 1976-12-25 | 1976-12-25 | Manufacture of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5380175A true JPS5380175A (en) | 1978-07-15 |
Family
ID=15634879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15676876A Pending JPS5380175A (en) | 1976-12-25 | 1976-12-25 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5380175A (en) |
-
1976
- 1976-12-25 JP JP15676876A patent/JPS5380175A/en active Pending
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